AMAT Applied Materials 0100-02292背板
1.产 品 资 料 介 绍:
- 高精度工艺设备场景:在光刻设备、薄膜沉积设备中,该背板可实现控制模块与精密电机驱动模块之间的高速信号传输,将信号延迟控制在 10ns 以内,保障电机运动的定位精度(偏差≤0.001mm),满足晶圆加工的微米级甚至纳米级工艺要求。
- 设备高负荷运行场景:在半导体生产线 24 小时连续运行的环境下,背板采用多通道并行供电设计,可根据各模块负载动态调整电力分配,避免因单一模块过载导致的供电故障,同时其优异的散热性能(通过基板导热与空气自然对流结合)可使工作温度稳定在 40℃以下,确保长期高负荷运行的可靠性。
- 洁净室严苛环境场景:背板表面采用无铅沉金工艺,无污染物析出,可耐受洁净室中 99% 异丙醇(IPA)的定期清洁,符合 ISO 5 级洁净室的颗粒控制标准(每立方英尺>0.5μm 颗粒<100 个),避免因部件污染影响晶圆生产质量。
AMAT Applied Materials 0100-02292背板 英文资料:
1、 Product positioning and core values
The AMAT 0100-02292 backplane is a key interconnect component in Applied Materials semiconductor equipment, mainly responsible for signal transmission and power distribution tasks between various functional modules (such as control modules, drive modules, and detection modules) inside the equipment. In the complex electrical system of semiconductor equipment, it is like a "neural network backbone", which not only needs to ensure the high-speed and stable data transmission between multiple modules, but also to achieve precise power distribution, providing reliable hardware support for the coordinated operation of various components of the equipment. It is an important basic component to ensure the high-precision and high-efficiency operation of semiconductor equipment.
2、 Core technical characteristics and process specifications
Technical dimension
Specific parameters and implementation details
Component Attributes
High density interconnect backplane for semiconductor equipment, adapted to the integration requirements of modular electrical systems in AMAT devices
Installation and positioning
The core area inside the electrical control cabinet of the equipment is installed using guide rail or screw fixation, with an alignment accuracy of ≤ 0.1mm with each functional module interface, and a reserved heat dissipation space of ≥ 20mm around the perimeter
Core functions
Multi module signal interconnection (supporting digital and analog signal transmission), centralized power distribution (providing adaptive voltage for different modules), module connection status monitoring
Material system
The substrate is made of FR-4 glass fiber epoxy resin (dielectric constant 4.0-4.5, dielectric loss tangent ≤ 0.02), the conductive layer is electrolytic copper (thickness 35 μ m-70 μ m), and the surface is treated with gold deposition process (gold layer thickness ≥ 1 μ m)
Electrical performance
The maximum signal transmission rate can reach 10Gbps, and the signal attenuation is ≤ 0.5dB/m (at 1GHz frequency); Power distribution supports multiple voltage outputs of 5V, 12V, and 24V, with a maximum total supply current of 50A and ripple ≤ 50mV in each supply channel
Connection interface
Equipped with more than 20 standard connectors (compatible with AMAT dedicated interface protocol), contact resistance ≤ 20m Ω, plug and unplug life ≥ 1000 times, with anti misoperation design (using unique key layout)
Protective performance
Insulation resistance ≥ 10 ¹² Ω, withstand voltage ≥ 1000V AC (no breakdown for 1 minute), operating temperature range -20 ℃ to 70 ℃, humidity adaptation range 10% -90% (no condensation)
3、 Scene adaptation and performance advantages
1. Adaptation to Semiconductor Core Scenarios
High precision process equipment scenario: In lithography equipment and thin film deposition equipment, this backplane can achieve high-speed signal transmission between the control module and the precision motor drive module, controlling the signal delay within 10ns, ensuring the positioning accuracy of the motor movement (deviation ≤ 0.001mm), and meeting the micro - or even nano level process requirements of wafer processing.
AMAT Applied Materials 0100-02292背板 产品展示
产品视频
3.其他产品
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ABB RTU560 560CMD11 通信单元
EKF ETH4 CN4-BELL 以太网控制器
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6ES5951-7LB21 | 531X121PCRAHG1 | 879-8103-001A |
6ES5948-3UR23 | 01-17423-003 | EXM-15A |
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6ES5948-3UA12 | 6SC6103-0SE30 | C52711-022 |
6ES5945-7UA21 | 6SC6500-ONA04 | CE945GM2B-440 |
6ES5943-7UB21 | 6SC6110-0EA00 | exm-10a |
6ES5942-7UB11 | 6SC6114-5DA00 | 61-0654-22 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218