AMAT Applied Materials 0100-00427互锁模块
1.产 品 资 料 介 绍：
- 多维度安全信号管控：集成至少 8 路数字 / 模拟输入接口，可实时采集腔体门盖状态（闭合 / 开启）、真空压力（正常 / 泄漏）、工艺气体流量（超标 / 正常）、腔体温度（超限 / 合规）等关键参数，信号响应延迟≤10ms，满足高速工艺的安全防护需求。
- 联锁逻辑智能执行：内置可编程安全控制器（如基于 SIL 2 安全等级设计），预设 MCVD 工艺专属联锁逻辑 —— 当检测到真空度低于 10⁻³Pa 或门盖未锁紧等异常时，可在 200ms 内触发三重保护：切断腔体加热电源、关闭气体进气阀门、启动真空泄放回路。
- 工业级稳定适配：采用 FR-4 环氧玻璃布基板与镀金引脚设计，工作温度范围覆盖 - 10~70℃，湿度耐受≤70% RH（无凝露），可适应半导体洁净车间（Class 100）的严苛环境，MTBF（平均无故障时间）≥50000 小时。
- 系统兼容与诊断功能：配备 DeviceNet 工业总线接口，可无缝接入 AMAT Centura Endura 等主设备控制系统，同时支持 LED 指示灯与上位机双重诊断，可精准定位信号断路、接口故障等问题，缩短维护时间。
AMAT Applied Materials 0100-00427互锁模块 英文资料：
1、 Core positioning and system of the product
0100-00427 interlock module is a key PCB component in the semiconductor equipment safety control system of Applied Materials Company (AMAT), belonging to the "Process Chamber Safety Interlock" product line. As the "logical center" of equipment safety protection, it is specifically adapted to core process units such as MCVD (Modified Chemical Vapor Deposition) chambers, and achieves risk prediction and emergency response by integrating multidimensional safety signals. It is the core protective component that ensures personnel safety, equipment integrity, and process stability in the semiconductor manufacturing process.
2、 Analysis of core functions and technical characteristics
Based on the industry standards for semiconductor safety interlocking and the application scenarios of this module, its core characteristics can be accurately defined as:
Multidimensional safety signal control: Integrated with at least 8 digital/analog input interfaces, it can real-time collect key parameters such as chamber door cover status (closed/open), vacuum pressure (normal/leakage), process gas flow rate (excessive/normal), chamber temperature (excessive/compliant), etc. The signal response delay is ≤ 10ms, meeting the safety protection requirements of high-speed processes.
Intelligent execution of interlocking logic: Built in programmable safety controller (such as based on SIL 2 safety level design), pre-set MCVD process exclusive interlocking logic - when detecting abnormalities such as vacuum degree below 10 ⁻ Pa or door cover not being locked, triple protection can be triggered within 200ms: cutting off the heating power supply of the chamber, closing the gas inlet valve, and starting the vacuum relief circuit.
Industrial grade stable adaptation: using FR-4 epoxy glass cloth substrate and gold-plated pin design, the working temperature range covers -10~70 ℃, the humidity tolerance is ≤ 70% RH (no condensation), and it can adapt to the harsh environment of semiconductor cleanrooms (Class 100), with MTBF (mean time between failures) ≥ 50000 hours.
System compatibility and diagnostic function: Equipped with DeviceNet industrial bus interface, it can seamlessly connect to main equipment control systems such as AMAT Centura Endura. It also supports dual diagnosis of LED indicator lights and upper computer, which can accurately locate problems such as signal disconnection and interface faults, and shorten maintenance time.
AMAT Applied Materials 0100-00427互锁模块 产品展示
产品视频
3.其他产品
Motorola IPMC761-002 输入输出模块
Schneider 140CPU67260 处理器模块
GE CK11CE300 接触器
4.其他英文产品
DSSB140 48980001-P Logic control card
DSTC175 57310001-KN Automation module
GRBTU 3BSE013175R1 base module
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| 6ES5470-7LC12 | CACR-PR30BC3AFY | 3HAB8101-19 DSQC545A |
| 6ES5470-7LB13 | CACR-SR05BB1BF | 6SC6101-2B-Z |
| 6ES5470-7LB12 | CONTROLLER | TSX3721101 |
| 6ES5470-7LA13 | CACR-SR03SB1AF | TSX07301012 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
