AMAT Applied Materials 03-81729-00激光探测器

AMAT Applied Materials 03-81729-00激光探测器

1.产 品 资 料 介 绍：

AMAT Applied Materials 03-81729-00激光探测器 英文资料：

1、 Core positioning and system of the product

03-81729-00 Laser detector is a key component in the semiconductor manufacturing equipment ecosystem of Applied Materials Company (AMAT), belonging to its core "Inspection and Measurement System" product line. As a precise monitoring unit in the entire process of semiconductor wafer manufacturing, this detector mainly serves the laser signal capture and analysis in chip production, supporting the quality control of multi ring joints from material deposition to etching, and is an important component to ensure chip yield.

2、 Speculation on core functions and technical characteristics

Based on the technical direction of AMAT and the industry standard for laser detectors, this product is likely to have the following characteristics:

High precision spectral response: Focusing on the commonly used laser bands in semiconductor manufacturing (such as infrared or deep ultraviolet regions), referring to the performance indicators of similar MCT infrared detectors, its spectral response range may cover 4-12 μ m, with peak detection rate (D *) or up to 10 ⁹ -10 ¹¹ cm · Hz ¹/²/W level, which can achieve precise capture of weak laser signals.

Fast response and low noise: Targeting the high-speed production needs of semiconductor manufacturing, the response time may be less than 3ns, coupled with low-noise amplifier circuit design, it can provide real-time feedback on laser energy fluctuations and adapt to high-frequency monitoring scenarios such as wafer defect detection.

Industrial grade environment adaptation: Made of durable materials such as aluminum and PC, the working temperature range may cover -20~60 ℃, the humidity tolerance is ≤ 65% RH, and the protection level is above IP65, which can adapt to the harsh environment of semiconductor cleanrooms.

System integration compatibility: As an original component of AMAT equipment, its interface design (such as SMA RF output) and control logic need to be seamlessly integrated with the main equipment such as deposition and etching, supporting the overall automation control of the equipment.

3、 Typical application scenarios

Based on the core business layout of AMAT, the application of this detector is focused on three major areas:

Wafer manufacturing process monitoring: Real time monitoring of laser interference signals in processes such as chemical vapor deposition (CVD) and physical vapor deposition (PVD), analyzing film thickness and uniformity to ensure material deposition accuracy.

Defect detection and measurement: In conjunction with wafer inspection equipment, micro level surface defects are identified through laser reflection/scattering signal analysis, supporting chip yield improvement and adapting to high-end manufacturing needs such as artificial intelligence and 5G chips.

Laser source calibration: As a standard detection unit, it is used for energy calibration and stability monitoring of the built-in laser source in equipment, ensuring the accuracy of key process parameters such as etching depth and ion implantation dose.

 AMAT Applied Materials  03-81729-00激光探测器 产品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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