AMAT Applied Materials 0100-20001电子接口模块
1.产 品 资 料 介 绍:
- 制程设备信号调度:用于刻蚀机、PVD 沉积设备的主控单元与射频匹配器、真空阀门等执行机构的信号交互,实现工艺参数的实时下发与状态反馈
- 检测数据传输中转:连接缺陷检测模块(如 DNP-CPCI-2 扫描仪)与设备主控制器,将亚微米级检测数据高速传输至分析系统
- 跨设备协同控制:在晶圆传送系统中,实现机器人、对准器与制程腔室的动作同步信号传输,保障自动化流程连贯性
AMAT Applied Materials 0100-20001电子接口模块 英文资料:
1、 Product core positioning
AMAT 0100-20001 is a high-performance electronic interface module specially designed by Applied Materials for multi system collaboration in semiconductor equipment. It belongs to the "signal conversion and transmission center" of equipment electrical control systems. Its core function is to achieve signal protocol conversion and high-speed data exchange among different subsystems (such as control units, actuators, and detection modules) in semiconductor equipment. It adapts to the cross module transmission of digital and analog signals through standardized interfaces, solves the communication compatibility problem between heterogeneous systems, and is a key connecting component to ensure the smooth operation of equipment automation processes.
Compared with general industrial interface modules, this model adopts semiconductor level anti-interference circuit design and redundant communication architecture, which can withstand high-frequency electromagnetic interference in process scenarios such as etching and deposition, adapt to harsh environments in clean workshops, and meet the high reliability communication requirements of advanced process equipment with 14nm and below.
2、 Key technical parameters (derived based on series commonalities and industry standards)
Based on the technical specifications of AMAT 0100 series modules, general requirements for semiconductor equipment interfaces, and characteristics of similar products, the core specifications of this model are speculated as follows:
Parameter category
Specification Description
Interface and Protocol Characteristics
Support multi protocol conversion: RS-485/RS-32 (serial), Ethernet (TCP/IP), I2C/SPI (industrial bus); Compatible with PROFINET communication standards
Signal transmission performance
Digital signal transmission rate ≥ 1Mbps, analog signal accuracy ± 0.1% FS; supports 8 input/8 output channels, channel isolation voltage ≥ 2500V DC
Power supply and power consumption
Redundant 24V DC power supply (compatible with 0100 series standard power supply), typical power consumption ≤ 8W, standby power consumption < 1W
Physical and Environmental Specifications
Size approximately 145 × 100 × 30mm, weight<300g; working temperature 0-60 ℃, humidity<85%, no condensation, cleanliness Class 100 requirement
Protection and Certification
Surface anti-static coating, interface adopts gold-plated contacts; Compliant with UL 61010-1 safety standards and EN 61000-6-2 anti-interference certification
3、 Application scenarios and adaptation systems
1. Core application areas
As the "communication bridge" of the device subsystem, this interface module mainly serves the multi system collaboration link in semiconductor manufacturing:
Process equipment signal scheduling: used for signal interaction between the main control unit of etching machines, PVD deposition equipment, RF matching devices, vacuum valves and other actuators, to achieve real-time issuance of process parameters and status feedback
Transfer of detection data: Connect the defect detection module (such as DNP-CPCI-2 scanner) with the device main controller to transmit sub micron level detection data at high speed to the analysis system
Cross device collaborative control: In the wafer transfer system, achieve synchronized signal transmission of the actions of robots, aligners, and process chambers to ensure the continuity of automated processes
AMAT Applied Materials 0100-20001电子接口模块 产品展示
产品视频
3.其他产品
FOXBORO FBM218/237 P0916QD 冗余适配器
Triconex 3624 数字输出模块
BENTLY 990-04-ХХ-01-05 165335-01 传感器
4.其他英文产品
BENTLY 3500/92 136180-01 Communication gateway module
CI854 3BSE025349R1 Control module
FEM100 P0973CA Extension module
710-404778-00 | 03-169460-00N | F31X125SNHADG2 |
710-404576-00 | 6DD1684-0DK0 | 710-652840-20 |
710-404556-00 | 531X121PCRAEG1 | F31X111PSHALGI |
710-404420-00 | 193X741EAG01 | F31X171TMAAFG2 |
710-404228-00 | 193X803BBG03 | 710-300015-01 |
710-404208-00 | 531X121PCRACG1 | 073-805314-00 |
710-404146-00 | 03-137064-00 | 740-612539-000 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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