AMAT Applied Materials 0100-90642等离子弧电流板
1.产 品 资 料 介 绍：
- 等离子体工艺管控：调节刻蚀机反应腔等离子弧电流，稳定等离子体密度，保障刻蚀图形精度。
- 设备安全防护：检测电流异常（如短路、过载），0.1s 内切断供电，避免射频电源损坏。
- 数据反馈联动：将电流数据传输至控制器，配合压力 / 温度传感器动态优化工艺参数。
- 安装：固定于电控柜屏蔽区，接线端子紧固扭矩 1.5-2N・m，接地电阻 ≤0.5Ω。
- 维护：每 3 个月清洁接线端子，每 6 个月校准电流精度，故障优先排查采样电阻 / 滤波电容。
- 采购：优先选择原厂供应商（如长欣自动化），到货验证精度报告与序列号溯源。
AMAT Applied Materials 0100-90642等离子弧电流板 英文资料：
1、 Core positioning
AMAT 0100-90642 is the "current control core" of semiconductor plasma processes, responsible for real-time acquisition, precise adjustment, and overcurrent protection of plasma arc current, ensuring stable plasma density in etching/deposition processes, and adapting to Class 100 clean environments and high-frequency electromagnetic interference scenarios.
2、 Key parameters
Category
Specifications
Current range
0-500A (supports 0-100A/0-300A grading)
Adjustment accuracy
±0.2% FS
Response speed
≤50μs
Protection function
Overcurrent protection (trip threshold 1.2 times rated current)
Environmental adaptation
-10-65 ℃ IP64、 Resistant to HF/Cl ₂ corrosion
Compatibility
Compatible with AMAT 0041-78374 RF matching components and 0225-01622 controller
3、 Core applications
Plasma process control: Adjust the plasma arc current in the reaction chamber of the etching machine, stabilize the plasma density, and ensure the accuracy of the etching pattern.
Equipment safety protection: detect abnormal current (such as short circuit, overload), cut off power supply within 0.1 seconds to avoid damage to the RF power supply.
Data feedback linkage: Transmit current data to the controller and dynamically optimize process parameters in conjunction with pressure/temperature sensors.
4、 Key points of operation and maintenance
Installation: Fixed in the shielding area of the electrical control cabinet, with a tightening torque of 1.5-2N · m for the wiring terminals and a grounding resistance of ≤ 0.5 Ω.
Maintenance: Clean the wiring terminals every 3 months, calibrate the current accuracy every 6 months, and prioritize troubleshooting sampling resistors/filtering capacitors for faults.
Procurement: Prioritize the selection of original suppliers (such as Changxin Automation), and verify the accuracy report and serial number traceability upon arrival.
5、 Technical value
High precision current regulation ensures process yield, overcurrent protection reduces equipment failure rate, compatibility with multiple systems reduces modification costs, and meets process requirements of 14nm and below.
AMAT Applied Materials 0100-90642等离子弧电流板 产品展示
产品视频
3.其他产品
B&R X20CM0289 控制器模块
A-B 6181P-19B3SW71AC 集成显示屏
WOODWARD 8402-271 气控电磁阀
4.其他英文产品
METSO IOP345 Industrial controller
METSO IOP353 logic card
KUC711AE 3BHB004661R0001 Excitation control module
| 6ES5735-8BC50 | CACR-SR-44BB1AM | 67-10804-000 |
| 6ES5734-5BD20 | CACR-UP130AABY18 | 061-00719-0027 |
| 6ES5734-1BD20 | CACR-SR03BB1AM | C52711-014R |
| 6ES5731-1BD20 | CACR-PR44BC3CSY165C | 60-0219-00 |
| 6ES5728-1BD00 | CACR-SR44SF1AFBY30 | EPC-26 |
| 6ES5727-1CD20 | CACR-SR44BY1SDY48E | 60-0147-02 |
| 6ES5727-0AA11 | CACR-SR10BE12G-E | 067-03351-0000 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
