AMAT Applied Materials 0100-71261互锁板
1.产 品 资 料 介 绍：
- 设备安全防护：控制刻蚀机 / 沉积设备的电控柜门、工艺舱门，未闭合则切断射频电源。
- 危险预警联动：接入气体泄漏检测器，泄漏时立即停工艺、开排风。
- 人机安全：配合安全光栅，人员进入危险区域时，暂停晶圆传送机器人。
- 安装：固定于电控柜 DIN 导轨，屏蔽线单端接地（≤0.5Ω），与高压模块间距≥30cm。
- 维护：每月检查接线端子，每 6 个月校准信号响应时间，故障优先排查输入信号短路 / 虚接。
- 采购：优先选原厂供应商（如长欣自动化），到货验证 SIL 认证与序列号溯源。
AMAT Applied Materials 0100-71261互锁板 英文资料：
1、 Core positioning
The AMAT 0100-71261 interlock board is the "core logic unit" for semiconductor equipment safety protection, responsible for integrating safety signals such as cabinet door switches, gratings, gas leak detectors, etc. When unauthorized operations or dangerous states are detected (such as cabinet doors not closed, gas leaks), the high voltage/power source is cut off within 0.1 seconds, and an alarm is triggered, adapting to Class 100 clean environments and corrosive process scenarios.
2、 Key parameters
Category
Specifications
Signal processing
8 safety inputs (24V DC), 4 safety outputs
Response speed
≤0.1s
Security level
SIL 2 certification
Environmental adaptation
-10-60 ℃ IP65、 Resistant to HF/Cl ₂
Compatibility
Compatible with AMAT 0225-01622 controller and 0100-20001 interface module
3、 Core applications
Equipment safety protection: Control the electrical control cabinet door and process cabin door of the etching machine/deposition equipment. If they are not closed, cut off the RF power supply.
Hazard warning linkage: Connect the gas leak detector, immediately stop the process and start the exhaust when there is a leak.
Human machine safety: In conjunction with safety barriers, suspend the wafer transfer robot when personnel enter hazardous areas.
4、 Key points of operation and maintenance
Installation: Fixed to the DIN rail of the electrical control cabinet, with shielded wire grounded at one end (≤ 0.5 Ω), and a distance of ≥ 30cm from the high-voltage module
Maintenance: Check the wiring terminals monthly, calibrate the signal response time every 6 months, and prioritize troubleshooting input signal short circuits/virtual connections.
Procurement: Prioritize selecting original suppliers (such as Changxin Automation), and verify SIL certification and serial number traceability upon arrival.
5、 Technical value
SIL 2 level and rapid response ensure that equipment has no safety accidents, modular design reduces failure points, is compatible with multiple device systems, and reduces renovation costs.
AMAT Applied Materials 0100-71261互锁板 产品展示
产品视频
3.其他产品
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B&R X20CM0289 控制器模块
A-B 6181P-19B3SW71AC 集成显示屏
4.其他英文产品
METSO IOP331 Servo module
METSO IOP341 Servo module
METSO IOP345 Industrial controller
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
