AMAT Applied Materials 0100-35565射频互锁模块
1.产 品 资 料 介 绍：
- 射频安全防护：监测刻蚀机射频接头密封性，泄漏时立即切断电源，防止人员灼伤。
- 工艺联锁控制：与腔室真空传感器联动，真空不达标时禁止射频启动，避免等离子体异常。
- 维护安全管控：维护人员打开射频柜时，自动锁定射频输出，防止误触触电。
- 安装：紧贴射频通路安装，屏蔽线单端接地（≤0.5Ω），与高压部件间距≥20cm。
- 维护：每月校准泄漏检测阈值，每 6 个月检查接线端子，故障优先排查传感器信号通路。
- 采购：优先选原厂供应商（如赛米卡尔电子），到货验证 SIL 认证与射频兼容性报告。
AMAT Applied Materials 0100-35565射频互锁模块 英文资料：
1、 Core positioning
AMAT 0100-35565 is a "safety protection hub" for semiconductor RF systems, dedicated to monitoring the status of RF paths (such as loose connectors, abnormal power). Once a danger signal is triggered (such as RF leakage, unauthorized operation), the RF power supply will be cut off within 0.05 seconds, and it is compatible with Class 100 clean environments and the mainstream RF frequency band of 13.56MHz.
2、 Key parameters
Category
Specifications
Monitoring scope
RF power 0-2000W, leakage threshold ≤ 5mW/cm ²
Response speed
≤0.05s
Security level
SIL 2 certification, compliant with SEMI S8 standard
Environmental adaptation
-5-65 ℃ IP65、 Resistant to radio frequency interference
Compatibility
Compatible with AMAT 0041-78374 RF matching components and 0190-09445 detector
3、 Core applications
RF safety protection: Monitor the sealing of the RF connector of the etching machine, cut off the power immediately in case of leakage, and prevent personnel from being burned.
Process interlocking control: linked with the chamber vacuum sensor, RF startup is prohibited when the vacuum does not meet the standard to avoid plasma abnormalities.
Maintain safety control: When maintenance personnel open the RF cabinet, the RF output is automatically locked to prevent accidental electric shock.
4、 Key points of operation and maintenance
Installation: Install in close proximity to the RF path, with shielded wire grounded at one end (≤ 0.5 Ω), and a distance of ≥ 20cm from high-voltage components
Maintenance: Calibrate the leakage detection threshold every month, check the wiring terminals every 6 months, and prioritize troubleshooting the sensor signal path for faults.
Procurement: Prioritize selecting original suppliers (such as Semicar Electronics), and verify SIL certification and RF compatibility reports upon arrival.
5、 Technical value
Millisecond level response blocks RF hazards, SIL 2 ensures personnel and equipment safety, is compatible with multiple RF components, and reduces the difficulty of system safety upgrades.
AMAT Applied Materials 0100-35565射频互锁模块 产品展示
产品视频
3.其他产品
WOODWARD 8402-271 气控电磁阀
Zygo 1115-801-346 激光头电缆
INDRAMAT TVM2.4-050-220/300-W1 电源模块
4.其他英文产品
KUC711AE01 3BHB004661R0001 Excitation module
METSO PDP401 logical unit module
METSO PDP403 logical unit module
| 6ES5707-1AA00 | CACR-SR03BE12G-E | 61-0626-00 |
| 6ES5706-5BF00 | CACR-SR03SB1BFY199 | P1366BX-SVE |
| 6ES5706-3BF00 | CACR-IR01SFB | 061-01771-0051 |
| 6ES5705-8BF01 | CACR-SR07BB1AM | 859-8379-001 |
| 6ES5705-5CC01 | CACR-SR10SZ1SFY90 | EPC-5A |
| 6ES5705-0BC50 | CACR-PR30BC3AFY161F | RB1W03-352-0 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
