AMAT Applied Materials 0100-11000分析输入板
1.产 品 资 料 介 绍：
- 分析设备数据采集：接收晶圆成分分析质谱仪的离子信号、薄膜厚度检测光谱仪的光强信号，转换为标准数据传输至控制模块。
- 工艺环境监测：采集反应腔温度、真空压力、气体浓度传感器信号，实时反馈工艺环境状态，辅助控制模块优化参数。
- 故障诊断数据支撑：记录设备运行中的关键信号波动（如射频功率反馈、电流信号），为设备故障溯源与预防性维护提供数据依据。
- 安装：适配 0100-02839 机架组件标准卡槽，信号线采用双绞屏蔽线（单端接地，接地电阻≤0.5Ω），远离射频模块与高压部件。
- 维护：每 3 个月清洁金手指与接线端子（用异丙醇无尘布）；每 6 个月校准采集精度（使用标准信号源）；故障优先排查输入信号短路、滤波电容老化。
- 采购：优先选原厂供应商（如长欣自动化、赛米卡尔电子），到货验证 ADC 转换精度报告、信号兼容性测试报告，确保适配现有分析设备。
AMAT Applied Materials 0100-11000分析输入板 英文资料：
1、 Core positioning
AMAT 0100-11000 is the "data acquisition core" of semiconductor equipment analysis and detection systems, designed specifically for high-precision reception of analog/digital signals from mass spectrometers, spectrometers, and sensors (such as temperature and pressure). Through built-in signal conditioning circuits, it achieves data noise reduction, amplification, and standardization conversion, adapts to Class 10 clean environments and low signal interference requirements, and provides precise data support for process analysis and quality control.
2、 Key parameters
Category
Specifications
Signal input
12 analog inputs (0-10V/4-20mA), 8 digital inputs (24V DC)
Collection accuracy
Analog input ± 0.05% FS, sampling rate ≤ 1kHz
Signal processing
Integrated 16 bit ADC converter, supporting digital filtering and signal amplification (gain adjustable from 1-100)
Environmental adaptation
-5-60 ℃, humidity<80%, anti EMI interference (EN 61000-6-2)
Security features
Input overvoltage protection (≤ 30V DC), reverse connection protection
Compatibility
Compatible with AMAT 0100-66025 control module, 03-81830-00 PCB, 0190-09445 detector
3、 Core applications
Analysis equipment data collection: Receive ion signals from wafer composition analysis mass spectrometer and light intensity signals from thin film thickness detection spectrometer, convert them into standard data, and transmit them to the control module.
Process environment monitoring: Collect signals from reaction chamber temperature, vacuum pressure, and gas concentration sensors, provide real-time feedback on the process environment status, and assist the control module in optimizing parameters.
Fault diagnosis data support: Record key signal fluctuations during equipment operation (such as RF power feedback and current signals), providing data basis for equipment fault tracing and preventive maintenance.
4、 Key points of operation and maintenance
Installation: Compatible with the 0100-02839 rack component standard card slot, the signal line adopts twisted pair shielded wire (single end grounded, grounding resistance ≤ 0.5 Ω), away from the RF module and high-voltage components.
Maintenance: Clean the gold fingers and wiring terminals every 3 months (using isopropanol dust-free cloth); Calibrate the collection accuracy every 6 months (using a standard signal source); Prioritize troubleshooting for input signal short circuits and aging filtering capacitors.
Procurement: Prioritize the selection of original suppliers (such as Changxin Automation and Semicar Electronics), verify the ADC conversion accuracy report and signal compatibility test report upon arrival, and ensure compatibility with existing analytical equipment.
AMAT Applied Materials 0100-11000分析输入板 产品展示
产品视频
3.其他产品
GE IC695CPE305LT-ABAD 通信模块
B&R 5AP981.1505-01 自动化面板
Bently 1701/25 监视器模块
4.其他英文产品
UFC719AE01 3BHB003041R0001 3BHB000272R0001 card
873EC-JIPFGZ Conductivity meter
FX-316 Industrial control module
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
