AMAT Applied Materials 0100-66025控制模块
1.产 品 资 料 介 绍：
- 工艺参数管控：接收等离子弧电流板（0100-90642）、压力传感器数据，动态调节射频匹配组件（0041-78374）功率，稳定等离子体密度。
- 执行器协同控制：联动气缸（3020-00121）、气动阀，实现晶圆载台定位、工艺腔门启闭的时序化动作，保障自动化流程连贯。
- 安全联锁响应：接入射频互锁模块（0100-35565）、气体泄漏检测器信号，危险场景下 0.5s 内切断动力源并触发报警。
- 安装：适配 0100-02839 机架组件标准插槽，电源线采用双绞屏蔽线，接地电阻≤0.5Ω，与射频模块间距≥20cm。
- 维护：每 3 个月备份控制程序与参数；每 6 个月校准模拟量输入 / 输出精度；故障优先排查通讯协议地址冲突或接线端子虚接。
- 采购：优先选原厂供应商（如长欣自动化、赛米卡尔电子），到货验证功能测试报告与 SEMI 安全认证，确保兼容设备现有系统。
AMAT Applied Materials 0100-66025控制模块 英文资料：
1、 Core positioning
AMAT 0100-66025 is the "process control center" for semiconductor equipment, responsible for integrating sensor data (such as temperature and pressure), actuator instructions (such as valves and motors), and safety interlock signals. It achieves real-time adjustment of process parameters and equipment safety control through built-in control algorithms, adapts to Class 100 clean environments and high-frequency electromagnetic interference scenarios, and ensures stable operation of processes such as etching and deposition.
2、 Key parameters
Category
Specifications
Control ability
Supports 8 analog inputs, 6 analog outputs, and 16 digital I/O channels
Computational performance
32-bit processor, instruction response time ≤ 1ms
Protocol compatibility
Supports Modbus RTU, Profinet, EtherNet/IP
Environmental adaptation
-10-65 ℃, humidity<85%, anti EMI interference (EN 61000-6-2)
Security features
Integrated overload protection and short circuit protection, compliant with SEMI S2/S8 standard
Compatibility
Compatible with AMAT 03-81830-00 PCB, 0100-00985 intelligent interface board, 0190-09445 detector
3、 Core applications
Process parameter control: Receive data from plasma arc current plate (0100-90642) and pressure sensor, dynamically adjust the power of RF matching component (0041-78374), and stabilize plasma density.
Collaborative control of actuators: linked cylinders (3020-00121) and pneumatic valves are used to achieve sequential actions of wafer stage positioning and process chamber door opening and closing, ensuring the continuity of automated processes.
Safety interlock response: Connect the RF interlock module (0100-35565) and gas leak detector signal, cut off the power source and trigger an alarm within 0.5 seconds in hazardous scenarios.
4、 Key points of operation and maintenance
Installation: Compatible with the standard slot of the 0100-02839 rack component, the power cord uses twisted pair shielded wire, the grounding resistance is ≤ 0.5 Ω, and the distance from the RF module is ≥ 20cm
Maintenance: Backup control programs and parameters every 3 months; Calibrate analog input/output accuracy every 6 months; Prioritize troubleshooting for communication protocol address conflicts or loose wiring terminals.
Procurement: Prioritize the selection of original suppliers (such as Changxin Automation and Semicar Electronics), provide functional testing reports and SEMI safety certifications upon arrival to ensure compatibility with existing equipment systems.
AMAT Applied Materials 0100-66025控制模块 产品展示
产品视频
3.其他产品
PHOENIX CONTACT 2864273 温度传感器
HONEYWELL 51153818-104 控制器模块
Berghof CE3CPU-1131 控制器模块
4.其他英文产品
UBC717BE101 3BHE021887R0101 Output module
UFC718AE01 HIEE300936R0001 Output card
UFC719AE01 3BHB003041R0001 3BHB000272R0001 card
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| 6ES5435-4UA12 | 6SC9811-42BE52 | 6ES5095-8MC03 |
| 6ES5434-7LA12 | CACR-SR15SB1AF | 6ES5375-1LA21 |
| 6ES5432-7LA11 | 6SC6600-4DA01 | 6DD3470-0AC0 |
| 6ES5431-8MD11 | CACR-SR10BE12G-C | 6DD3462-0AB0 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
