AMAT Applied Materials 0100-09063模拟输入模块
1.产 品 资 料 介 绍：
- 工艺参数采集：接收反应腔温度传感器（如 Pt100）、真空压力传感器的模拟信号，转换为数字信号传输至控制模块，保障刻蚀 / 沉积工艺参数稳定。
- 执行器状态反馈：采集气缸（3020-00121）位置传感器、气体流量控制器（MFC）的模拟反馈信号，实时监控执行元件运行状态，避免动作偏差。
- 设备健康监测：采集射频匹配组件（0041-78374）的电流 / 电压模拟信号，分析信号波动趋势，提前预警组件性能衰减。
AMAT Applied Materials 0100-09063模拟输入模块 英文资料：
1、 Core positioning
AMAT 0100-09063 is an "analog signal acquisition hub" for semiconductor equipment electronic control systems, designed specifically for receiving analog signals from sensors such as temperature, pressure, and flow. Through built-in high-precision conditioning circuits, it achieves signal noise reduction, linearization processing, and standardized conversion, adapting to Class 100 clean environments and high-frequency electromagnetic interference scenarios, providing stable analog data support for equipment control and process monitoring.
2、 Key parameters
Category
Specifications
Input channel
8 differential analog inputs, supporting 0-5V/0-10V/4-20mA signal types
Collection performance
18 bit ADC resolution, acquisition accuracy ± 0.02% FS, sampling rate adjustable from 10Hz-1kHz
Signal processing
Integrated low-pass filtering (cut-off frequency 50Hz/100Hz optional), signal isolation (channel isolation voltage ≥ 1000V DC)
Environmental adaptation
-10-65 ℃, humidity<85%, no condensation, anti EMI interference (EN 61000-6-2)
Security features
Input overvoltage protection (≤ 36V DC), overcurrent protection (≤ 50mA)
Compatibility
Compatible with AMAT 0100-66025 control module, 03-81830-00 PCB, 0100-02839 rack components
3、 Core applications
Process parameter acquisition: Receive analog signals from reaction chamber temperature sensors (such as Pt100) and vacuum pressure sensors, convert them into digital signals, and transmit them to the control module to ensure stable etching/deposition process parameters.
Feedback on actuator status: Collect analog feedback signals from the cylinder (3020-00121) position sensor and gas flow controller (MFC), monitor the operating status of the actuator in real time, and avoid action deviation.
Equipment health monitoring: Collect current/voltage analog signals from RF matching components (0041-78374), analyze signal fluctuation trends, and provide early warning of component performance degradation.
AMAT Applied Materials 0100-09063模拟输入模块 产品展示
产品视频
3.其他产品
GE IC695CPE305LT-ABAD 通信模块
B&R 5AP981.1505-01 自动化面板
Bently 1701/25 监视器模块
4.其他英文产品
UFC719AE01 3BHB003041R0001 3BHB000272R0001 card
873EC-JIPFGZ Conductivity meter
FX-316 Industrial control module
| 6ES5420-7LA11 | CACR-PR03AE3ER | 6DD1843-0AB0 |
| 6ES5420-4UA14 | CACR-IR050505FC | 6AV30101DK00 |
| 6ES54201BA11 | CACR-SR30SB1AFY124 | 6DD1843-0AA0 |
| 6ES5405-7AB21 | CACR-HR05BAB12 | 6DD2920-3AW4 |
| 6ES5395-0UA11 | 6SC6180-0SG02 | 6DD2920-3AW3 |
| 6ES5393-0UA14 | CACR-CSL20DAAA, | 6ES5375-0LC41 |
| 6ES5382-0AA31 | 6SC6506-4AA02 | 6DD2920-3AW2 |
| 6ES5377-0BB41 | 6SC6108-0SE02 | 6ES5374-2AH21 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
