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AMAT Applied Materials 0680-01723断路器

发布时间:2025-10-10人气:
  • AMAT Applied Materials 0680-01723断路器

AMAT Applied Materials  0680-01723断路器

1.产 品 资 料 介 绍:

一、液压电磁双模式精准保护能力
作为半导体设备的核心电力防护部件,0680-01723 断路器的核心优势在于全场景过流精准管控性能。参考半导体设备电力系统特性,该断路器采用液压电磁融合保护技术,集成过载与短路双保护功能于单一结构件,替代传统热磁式断路器的分离式设计。其核心组件为填充硅油的延时管与电磁线圈,当回路电流达到 1.25 倍额定值时,磁动力克服弹簧弹力推动铁芯动作,实现低倍过载的高精度触发;遭遇短路等高倍过载时,线圈瞬间产生强磁场驱动衔铁吸合,即使延时管铁芯因硅油阻尼运动缓慢,仍可在 100μs 内快速分断电路。通过定制硅油粘度实现可调节延时曲线,能精准匹配刻蚀机、薄膜沉积设备等不同负载的保护需求,避免误触发导致的产线停机。
二、严苛环境专项适配设计
针对半导体洁净室与设备集群的复杂工况,该断路器在材质与结构上凸显宽温稳定与洁净兼容特性。采用液压电磁式结构设计,彻底摆脱双金属片对温度的敏感性,在 - 40℃至 85℃的宽温区间内无需降额使用,完全适配不同地域厂房的环境温差。外壳选用符合 SEMI F57 标准的 316L 不锈钢材质,经钝化处理后金属离子析出量低于 0.05ppm,配合 IP67 级防护封装,可抵御洁净室湿度波动及 HF、H2SO4 等化学品的微量侵蚀。电路部分采用全金属屏蔽罩设计,电磁干扰抑制能力达 110dB 以上,能有效抵御刻蚀机射频电源产生的强电磁辐射,避免误动作影响设备运行。
三、全系统无缝兼容与联动能力
为适配 AMAT 全系列半导体设备,该断路器具备跨平台电气集成特性。硬件层面支持 220V-800V 宽电压输入,额定电流覆盖 1A-50A 多档位配置,可直接接入 Reflexion CMP 设备、Centris 刻蚀系统的主电力回路,无需额外调压模块。配备 EtherCAT 实时通信接口,通信周期低至 250μs,能与 FabWorks 生产执行系统及 0100-20003 数字 I/O 板实现实时数据交互,将跳闸状态、电流参数等信息同步至设备主控单元。接口采用 AMAT 标准针脚定义,通过 2.54mm 间距连接器实现快速插拔,同时兼容 SEMI E134 通信协议,支持与第三方电力监控系统的数据互通。

AMAT Applied Materials  0680-01723断路器 英文资料:

1. Precise protection capability in both hydraulic and electromagnetic modes

As a core power protection component of semiconductor equipment, the core advantage of the 0680-01723 circuit breaker lies in its precise overcurrent control performance in all scenarios. Referring to the characteristics of the power system of semiconductor equipment, this circuit breaker adopts the hydraulic electromagnetic fusion protection technology, integrating the dual protection functions of overload and short circuit into a single structural component, replacing the separated design of traditional thermal-magnetic circuit breakers. Its core components are a delay tube filled with silicone oil and an electromagnetic coil. When the loop current reaches 1.25 times the rated value, the magnetic force overcomes the spring force to push the core to act, achieving high-precision triggering of low-overload. When encountering high-multiple overloads such as short circuits, the coil instantly generates a strong magnetic field to drive the armature to close. Even if the delay tube core moves slowly due to silicone oil damping, the circuit can still be quickly disconnected within 100μs. By customizing the viscosity of silicone oil to achieve an adjustable delay curve, it can precisely match the protection requirements of different loads such as etching machines and thin film deposition equipment, avoiding production line shutdowns caused by false triggering.

Second, special adaptation design for harsh environments

For the complex working conditions of semiconductor cleanrooms and equipment clusters, this circuit breaker highlights the characteristics of wide-temperature stability and clean compatibility in terms of material and structure. It adopts a hydraulic electromagnetic structure design, completely getting rid of the temperature sensitivity of bimetallic strips. It can be used without derating within a wide temperature range of -40 ℃ to 85℃, fully adapting to the environmental temperature differences of factories in different regions. The shell is made of 316L stainless steel that complies with the SEMI F57 standard. After passivation treatment, the precipitation of metal ions is less than 0.05ppm. Combined with IP67-level protective packaging, it can resist the humidity fluctuations in the clean room and the trace erosion of chemicals such as HF and H2SO4. The circuit section adopts a fully metal shielding cover design, with an electromagnetic interference suppression capability of over 110dB, which can effectively resist the strong electromagnetic radiation generated by the RF power supply of the etching machine and prevent false actions from affecting the operation of the equipment.

Iii. Seamless compatibility and interconnection capabilities across the entire system

To be compatible with the full range of AMAT semiconductor equipment, this circuit breaker features cross-platform electrical integration. At the hardware level, it supports a wide voltage input range of 220V to 800V, with rated current covering multiple configurations from 1A to 50A. It can be directly connected to the main power circuits of Reflexion CMP devices and Centris etching systems without the need for additional voltage regulation modules. Equipped with an EtherCAT real-time communication interface, with a communication cycle as low as 250μs, it can interact with the FabWorks production execution system and the 0100-20003 digital I/O board in real time for data exchange, synchronizing information such as tripping status and current parameters to the main control unit of the equipment. The interface is defined by AMAT standard pins and can be quickly plugged and unplugged through a 2.54mm pitch connector. Meanwhile, it is compatible with the SEMI E134 communication protocol and supports data intercommunication with third-party power monitoring systems.

AMAT Applied Materials   0680-01723断路器 产品展示      

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 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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