AMAT Applied Materials 0010-47052控制器
1.产 品 资 料 介 绍：
- 适用系统：优先适配 AMAT Producer 系列 CVD 设备，兼容 AMAT 同类薄膜沉积设备的工艺控制单元
- 控制通道：4 路温度控制（适配 PT100/PT1000 传感器）、6 路气体流量控制（适配质量流量控制器）、2 路压力控制（适配真空压力传感器）
- 控制精度：温度控制 ±0.1℃（200-500℃区间）、流量控制 ±0.5% FS、压力控制 ±0.2% FS
- 通信接口：EtherCAT（实时控制）、RS485（Modbus-RTU 协议）、以太网（TCP/IP，支持 MES 系统对接）
- 电源需求：DC 24V±10%，功耗≤20W（满负载运行），具备过压（30V）、欠压（18V）、过流（1A）保护
- 物理尺寸：长 180mm× 宽 100mm× 高 40mm，安装孔位适配原厂设备电气柜，M3 螺丝固定
- 环境适应：工作温度 - 10℃-65℃，相对湿度≤90% RH（无凝露），抗电磁干扰符合 EN 61000-6-2 标准
- 高精度工艺控制：采用自适应 PID 算法，实时补偿负载波动，确保多参数协同稳定，满足半导体高精度镀膜需求
- 原厂无缝兼容：接口定义、通信协议、控制逻辑与原厂完全匹配，替换后无需重新校准工艺参数，停机时间≤1 小时
- 高可靠性：工业级核心芯片 + 隔离电路设计，平均无故障运行时间（MTBF）≥5 万小时，适应设备长期连续运行
AMAT Applied Materials 0010-47052控制器 英文资料：
1、 Product Overview
The AMAT 0010-47052 controller is the process parameter control core of semiconductor thin film deposition equipment, such as the AMAT Producer series CVD coating machine. It mainly realizes real-time monitoring and precise adjustment of chamber temperature, gas flow rate, and deposition pressure, and ensures the uniformity and consistency of thin film growth through closed-loop control algorithms. The module supports seamless communication with device sensors, actuators, and upper computers, and can directly ｒｅｐｌａｃｅ the original controller of the same model without adjusting the device control logic, quickly restoring process control functions.
2、 Key parameters
Applicable system: Priority adaptation to AMAT Producer series CVD equipment, compatible with process control units of similar AMAT thin film deposition equipment
Control channels: 4-channel temperature control (compatible with PT100/PT1000 sensors), 6-channel gas flow control (compatible with mass flow controllers), 2-channel pressure control (compatible with vacuum pressure sensors)
Control accuracy: Temperature control ± 0.1 ℃ (200-500 ℃ range), flow control ± 0.5% FS, pressure control ± 0.2% FS
Communication interfaces: EtherCAT (real-time control), RS485 (Modbus RTU protocol), Ethernet (TCP/IP, supporting MES system docking)
Power requirement: DC 24V ± 10%, power consumption ≤ 20W (full load operation), with overvoltage (30V), undervoltage (18V), overcurrent (1A) protection
Physical dimensions: 180mm in length, 100mm in width, and 40mm in height. The installation holes are compatible with the original equipment electrical cabinet and fixed with M3 screws
Environmental adaptation: Working temperature -10 ℃ -65 ℃, relative humidity ≤ 90% RH (no condensation), anti electromagnetic interference in accordance with EN 61000-6-2 standard
3、 Core advantages
High precision process control: adopting adaptive PID algorithm to compensate for load fluctuations in real time, ensuring multi parameter coordinated stability, and meeting the high-precision coating requirements of semiconductors
Seamless compatibility with the original factory: interface definition, communication protocol, and control logic are completely matched with the original factory, and there is no need to recalibrate process parameters after replacement. The downtime is ≤ 1 hour
High reliability: Industrial grade core chip+isolation circuit design, mean time between failures (MTBF) ≥ 50000 hours, suitable for long-term continuous operation of equipment
AMAT Applied Materials 0010-47052控制器 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
