AMAT Applied Materials AP001871-00高压电源模块
1.产 品 资 料 介 绍：
- 适用系统：优先适配 AMAT Centura/Producer 系列等离子体设备，兼容 AMAT 同类高压供电场景（如静电吸盘、等离子体源）
- 输出特性：额定输出电压 0-10kV DC（连续可调），额定输出电流 0-10mA，电压调节精度≤±0.5% FS，输出纹波≤50Vpp（10Hz-20MHz）
- 输入规格：AC 220V±10%（50/60Hz），输入功率≤150W，功率因数≥0.9（满负载）
- 控制方式：支持模拟量控制（0-5V/4-20mA，对应 0-10kV 输出）、RS485 通信控制（Modbus-RTU 协议，支持远程电压设置与状态读取）
- 保护功能：过压保护（11kV 触发，自动切断输出）、过流保护（12mA 触发）、过温保护（85℃触发）、高压短路保护（响应时间≤10μs）、输入欠压保护（180V AC 触发）
- 物理尺寸：长 200mm× 宽 120mm× 高 60mm，安装孔位适配原厂设备高压柜，M4 螺丝固定（力矩 1.0-1.2N・m）
- 环境与安全：工作温度 - 10℃-60℃，相对湿度≤85% RH（无凝露），高压绝缘等级 CLASS II，外壳接地电阻≤1Ω，抗电磁干扰符合 EN 61000-6-2 标准
AMAT Applied Materials AP001871-00高压电源模块 英文资料：
AMAT Applied Materials AP001871-00 High Voltage Power Module Manual (Simplified Version)
1、 Product Overview
The AMAT AP001871-00 high-voltage power module is the high-voltage power supply core of semiconductor plasma process equipment, such as the AMAT Centura series etching machine and Producer series CVD coating machine. It mainly provides stable high-voltage DC output for the equipment plasma generator and electrostatic suction cup, and controls the plasma density and electrostatic adsorption force through precise voltage adjustment to meet the strict requirements of semiconductor processes for high-voltage stability. The module has multiple high-voltage safety protections and can be directly replaced with original modules of the same model without the need to adjust the high-voltage circuit of the equipment, quickly restoring the process power supply function.
2、 Key parameters
Applicable system: Priority adaptation to AMAT Centura/Producer series plasma equipment, compatible with similar high-voltage power supply scenarios of AMAT (such as electrostatic suction cups, plasma sources)
Output characteristics: Rated output voltage 0-10kV DC (continuously adjustable), rated output current 0-10mA, voltage regulation accuracy ≤± 0.5% FS, output ripple ≤ 50Vpp (10Hz-20MHz)
Input specifications: AC 220V ± 10% (50/60Hz), input power ≤ 150W, power factor ≥ 0.9 (full load)
Control mode: Supports analog control (0-5V/4-20mA, corresponding to 0-10kV output), RS485 communication control (Modbus RTU protocol, supports remote voltage setting and status reading)
Protection functions: overvoltage protection (triggered by 11kV, automatically cutting off output), overcurrent protection (triggered by 12mA), over temperature protection (triggered by 85 ℃), high voltage short circuit protection (response time ≤ 10 μ s), input undervoltage protection (triggered by 180V AC)
Physical dimensions: 200mm in length, 120mm in width, and 60mm in height. The installation holes are compatible with the original equipment high-voltage cabinet and fixed with M4 screws (torque 1.0-1.2N · m)
Environment and safety: Working temperature -10 ℃ -60 ℃, relative humidity ≤ 85% RH (no condensation), high voltage insulation level CLASS II, shell grounding resistance ≤ 1 Ω, anti electromagnetic interference in accordance with EN 61000-6-2 standard
AMAT Applied Materials AP001871-00高压电源模块 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
