AMAT Applied Materials 0010-26057晶圆升降组件
1.产 品 资 料 介 绍：
- 设备适配：匹配 AMAT CVD/PVD/ 蚀刻机台（如 Producer、Endura 系列），可接入原有自动化系统，无需改协议。
- 晶圆兼容：主打 300mm 晶圆，换氧化铝陶瓷托盘（Ra≤0.2μm）可兼容 200mm，防划伤薄膜。
- 核心功能：负责晶圆在腔室间升降转运，确保与腔室部件同轴度误差≤0.1mm，保障工艺均匀性。
- 定位精度：亚微米级闭环控制，光栅尺（0.1μm）+ 伺服电机（0.8N・m），误差 ±0.5μm，适配 3x 纳米制程。
- 运行稳定：谐波减速器（≤1 弧分）消间隙，升降速度 0.5-5mm/s 可调，接近部件时自动低速（0.5mm/s）。
- 环境适应：真空兼容（漏率≤1×10⁻⁹ Pa・m³/s，1×10⁻³ - 1×10⁻⁷ Pa 可用），Y₂O₃涂层抗等离子腐蚀，寿命超 10000 小时。
- 模块化：分驱动 / 承载 / 检测单元，标准化接口，单独更换≤30 分钟，降停机成本。
- 晶圆防护：三点柔性支撑（接触 0.5mm²）减污染，聚氨酯缓冲（50 Shore A，行程 2mm）防碎裂。
- 清洁适配：无死角结构 + 钝化处理（耐蚀≥9 级），兼容 IPA、氨水清洁，支持在线维护。
AMAT Applied Materials 0010-26057晶圆升降组件 英文资料：
1. Adaptation scenarios and functions (0010-26057)
Equipment adaptation: Matching AMAT CVD/PVD/etching machines (such as Producer, Endura series), can be integrated into existing automation systems without changing protocols.
Wafer compatibility: Mainly designed for 300mm wafers, compatible with 200mm and scratch resistant film on aluminum oxide ceramic trays (Ra ≤ 0.2 μ m).
Core function: Responsible for lifting and transporting wafers between chambers, ensuring coaxiality error with chamber components is ≤ 0.1mm, and ensuring process uniformity.
2. Accuracy and Performance (0010-26057)
Positioning accuracy: sub micron level closed-loop control, grating ruler (0.1 μ m)+servo motor (0.8N · m), error ± 0.5 μ m, suitable for 3x nanometer process.
Stable operation: Harmonic reducer (≤ 1 arc minute) eliminates clearance, adjustable lifting speed of 0.5-5mm/s, and automatically slows down (0.5mm/s) when approaching components.
Environmental adaptation: Vacuum compatible (leakage rate ≤ 1 × 10 ⁻⁹ Pa · m ³/s, 1 × 10 ⁻³ -1 × 10 ⁻⁷ Pa available), Y ₂ O3 coating resistant to plasma corrosion, with a lifespan of over 10000 hours.
3. Structure and Protection (0010-26057)
Modularization: divided into drive/load/detection units, standardized interfaces, individual replacement ≤ 30 minutes, reducing downtime costs.
Wafer protection: Three point flexible support (contact 0.5mm ²) reduces pollution, polyurethane buffer (50 Shore A, stroke 2mm) prevents breakage.
Cleaning adaptation: no dead corner structure+passivation treatment (corrosion resistance ≥ 9 levels), compatible with IPA and ammonia cleaning, supports online maintenance.
AMAT Applied Materials 0010-26057晶圆升降组件 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
