AMAT Applied Materials 5000-170阀门控制器
1.产 品 资 料 介 绍：
- 设备适配：匹配 AMAT 半导体真空腔室（如蚀刻、沉积设备），控制气动 / 电动真空阀门，适配 Gate Valve、Butterfly Valve 等主流阀门类型。
- 工艺兼容：聚焦真空环境下的阀门精准控制，适配晶圆制造中真空抽排、气体切换等工序，支持 1×10⁻³ - 1×10⁻⁹ Pa 真空区间使用。
- 核心功能：实现阀门开关 / 调节的闭环控制，配合设备主控系统完成压力调节、气体流量控制，保障工艺稳定性。
- 控制精度：阀门开度调节精度 ±1%，开关响应时间≤100ms，压力控制偏差≤0.5% FS，适配 3x 纳米制程对真空环境的严苛要求。
- 信号兼容：支持 4-20mA 模拟量、RS-485 数字量信号输入 / 输出，可接入 AMAT 设备 PLC 系统，实现远程监控与参数调整。
- 运行稳定：内置 PID 调节算法，自动补偿温度、压力波动对阀门控制的影响，连续运行无漂移，平均无故障时间（MTBF）超 5000 小时。
- 防护设计：外壳防护等级 IP65，防粉尘、防车间清洁泼溅；电路具备防静电（ESD）、防电磁干扰（EMI）设计，适应半导体车间电磁环境。
- 安装适配：紧凑型结构（尺寸约 150×100×50mm），支持导轨式 / 壁挂式安装，适配设备控制柜内有限空间，接线端子带防呆设计，避免误接。
- 维护便利：面板配备 LCD 显示屏 + 按键，可本地查看 / 设置参数（如阀门开度、压力阈值），支持故障代码显示，快速定位问题。
AMAT Applied Materials 5000-170阀门控制器 英文资料：
1. Adaptation scenarios and functions (5000-170)
Equipment adaptation: Match AMAT semiconductor vacuum chambers (such as etching and deposition equipment), control pneumatic/electric vacuum valves, and adapt to mainstream valve types such as Gate Valve and Butterfly Valve.
Process compatibility: Focus on precise control of valves in vacuum environments, adapt to processes such as vacuum pumping and gas switching in wafer manufacturing, and support the use of 1 × 10 ⁻³ -1 × 10 ⁻⁹ Pa vacuum intervals.
Core function: Implement closed-loop control of valve opening/adjustment, cooperate with the equipment main control system to complete pressure regulation and gas flow control, and ensure process stability.
2. Accuracy and performance (5000-170)
Control accuracy: Valve opening adjustment accuracy ± 1%, switch response time ≤ 100ms, pressure control deviation ≤ 0.5% FS, suitable for the strict requirements of 3x nanometer process on vacuum environment.
Signal compatibility: Supports 4-20mA analog and RS-485 digital signal input/output, can be connected to AMAT equipment PLC system, and achieve remote monitoring and parameter adjustment.
Stable operation: Built in PID regulation algorithm, automatically compensates for the impact of temperature and pressure fluctuations on valve control, continuous operation without drift, and an average time between failures (MTBF) of over 5000 hours.
3. Structure and Protection (5000-170)
Protection design: The shell protection level is IP65, which prevents dust and workshop cleaning splashes; The circuit is designed with anti-static (ESD) and electromagnetic interference (EMI) protection to adapt to the electromagnetic environment of semiconductor workshops.
Installation adaptation: Compact structure (size approximately 150 × 100 × 50mm), supports rail/wall mounted installation, adapts to limited space inside equipment control cabinets, and has foolproof terminal design to avoid misconnection.
Easy maintenance: The panel is equipped with an LCD display screen and buttons, which can locally view/set parameters (such as valve opening and pressure threshold), support fault code display, and quickly locate problems.
AMAT Applied Materials 5000-170阀门控制器 产品展示
产品视频
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| PMA22B-01100-22 | AMAT 0100-35279 | PFTL101A-1.0KN 3BSE004166R1 |
| PMA22B-01100-00 | AMAT 0100-77043 | PFTL 101AER-1.0KN |
| PMA22B-00100-00 | AMAT 0100-00060 | PFTL-101A 3BSE008508R1 |
| PMA21B-10100-00 | AMAT 0100-00059 | PFEA112-65 |
| PMA21B-01100-00 | ANAT 0100-76091 | PFRL101A |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
