Gasonics 17305-01发动机
1.产 品 资 料 介 绍：
产品名称：
Gasonics 17305-01 微波电源发电机
产品概述：
Gasonics 17305-01 是一款应用于等离子体处理设备（如 Aura 3000/3010 系列）的微波发电模块。该装置主要负责生成高频微波能量，用于激发等离子体，从而实现晶圆清洗、去胶等工艺。
技术参数（典型）：
功率等级：约 1250W 至 2000W
输出频率：标准工业微波频段（常为2.45 GHz）
输入电压：200–240V AC，单相或三相（视设备配置）
接口类型：微波输出接口 + 控制信号端口
结构形式：模块化设计，适配 Gasonics 系列主机系统
应用领域：
半导体等离子体清洗工艺（如光刻胶剥离）
Gasonics Aura 3000/3010 等设备中的微波功率单元
工艺开发实验室及晶圆制造产线中的等离子体支持系统
微电子、MEMS、封装前处理相关制造设备
产品优势：
输出稳定，确保等离子体激发质量
与原厂设备高度兼容
支持模块化替换与维护
适应洁净室及工业级运行环境
英文资料：
Product Name:
Gasonics 17305-01 Microwave Power Generator
Product Overview:
Gasonics 17305-01 is a microwave power generation module used in plasma processing equipment such as the Aura 3000/3010 series. This device is mainly responsible for generating high-frequency microwave energy for exciting plasma, thereby achieving processes such as wafer cleaning and debonding.
Technical parameters (typical):
Power level: approximately 1250W to 2000W
Output frequency: Standard industrial microwave frequency band (usually 2.45 GHz)
Input voltage: 200-240V AC, single-phase or three-phase (depending on equipment configuration)
Interface type: microwave output interface+control signal port
Structural form: Modular design, compatible with Gasonics series host systems
Application areas:
Semiconductor plasma cleaning process (such as photoresist stripping)
Microwave power units in equipment such as Gasonics Aura 3000/3010
Plasma support system in process development laboratory and wafer manufacturing production line
Microelectronics MEMS、 Pre packaging processing related manufacturing equipment
Product advantages:
Stable output ensures plasma excitation quality
Highly compatible with original equipment
Support modular replacement and maintenance
Adapt to cleanroom and industrial grade operating environments
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
