Gasonics AWD-D-3-6-002磁控波导
1.产 品 资 料 介 绍：
产品概述：
该磁控波导组件主要用于将微波源（通常为磁控管）输出的微波能量高效传输到等离子体处理腔体。它是 Gasonics Aura 系列等离子清洗设备中的关键部件，保障微波功率传输的稳定性和方向性。
应用领域：
半导体制造
用于晶圆清洗、去胶、蚀刻等等离子体工艺
适配 Aura 3000 / 3010 系列等离子清洗设备
微波等离子激发系统
波导结构确保微波能量准确传输，提高等离子密度和均匀性
设备维护与升级
在设备长期运行或磁控波导老化时，作为关键替换模块保障设备性能
工艺一致性控制
通过稳定微波传输路径，保障工艺结果重复性
产品优势：
微波传输效率高，损耗小
与原厂设备兼容性好，便于更换
结构坚固，适用于洁净室环境
提升设备整体运行稳定性和工艺精度
英文资料：
Product Overview:
This magnetron waveguide component is mainly used to efficiently transmit the microwave energy output by a microwave source (usually a magnetron) to the plasma processing chamber. It is a key component in the Gasonics Aura series plasma cleaning equipment, ensuring the stability and directionality of microwave power transmission.
Application areas:
Semiconductor Manufacturing
Used for plasma processes such as wafer cleaning, debonding, etching, etc
Compatible with Aura 3000/3010 series plasma cleaning equipment
Microwave plasma excitation system
The waveguide structure ensures accurate transmission of microwave energy, improves plasma density and uniformity
Equipment maintenance and upgrade
As a key replacement module to ensure equipment performance during long-term operation or aging of magnetic waveguides
Process consistency control
By stabilizing the microwave transmission path, ensure the repeatability of the process results
Product advantages:
Microwave transmission has high efficiency and low loss
Good compatibility with original equipment, easy to ｒｅｐｌａｃｅ
Sturdy structure, suitable for cleanroom environments
Improve the overall operational stability and process accuracy of the equipment
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
