Gasonics 95-3155控制器

Gasonics 95-3155控制器

1.产 品 资 料 介 绍：

产品名称：
Gasonics 95-3155 控制器模块

产品概述：
Gasonics 95-3155 是一款用于 Gasonics 等离子体处理系统中的控制器模块，主要承担设备运行控制、状态监测和参数调节等功能。它作为整机的电子控制核心，协调微波发电、气体流量、温度监控等子系统的工作，是设备实现自动化运行的关键部件。

应用领域：

1. 等离子体去胶设备控制系统

   • 用于 Gasonics Aura 系列等离子清洗设备，控制整个工艺流程，包括微波能量激发、气体混合比例、真空泵工作状态等。

2. 半导体制造过程自动化

   • 支持光刻胶剥离、晶圆表面处理等工艺，通过精密控制保障处理一致性与重复性。

3. 工艺参数设定与执行

   • 通过该控制器模块设定和执行预设工艺配方，确保每片晶圆在同等条件下处理。

4. 设备故障监控与保护

   • 内置安全逻辑与报警功能，在运行过程中可对异常状态自动响应或停机，防止损坏核心部件。

产品优势：

• 与 Gasonics 系列设备高度集成，安装简便

• 支持多参数调节和监控，提高工艺精度

• 稳定性强，适用于长期连续运行的生产环境

• 有助于提高设备自动化水平与维护效率

英文资料：

Product Name:

Gasonics 95-3155 Controller Module

Product Overview:

Gasonics 95-3155 is a controller module used in Gasonics plasma processing systems, mainly responsible for equipment operation control, status monitoring, and parameter adjustment. As the electronic control core of the entire machine, it coordinates the work of subsystems such as microwave power generation, gas flow, and temperature monitoring, and is a key component for achieving automated operation of the equipment.

Application areas:

Control system for plasma debonding equipment

Used for Gasonics Aura series plasma cleaning equipment, controlling the entire process flow, including microwave energy excitation, gas mixing ratio, vacuum pump working status, etc.

Automation of semiconductor manufacturing process

Support processes such as photoresist stripping and wafer surface treatment, ensuring consistency and repeatability of processing through precise control.

Process parameter setting and execution

By setting and executing preset process recipes through this controller module, it ensures that each wafer is processed under the same conditions.

Equipment fault monitoring and protection

Built in safety logic and alarm function, which can automatically respond to abnormal states or shut down during operation to prevent damage to core components.

Product advantages:

Highly integrated with Gasonics series equipment, easy to install

Support multi parameter adjustment and monitoring to improve process accuracy

Strong stability, suitable for long-term continuous operation in production environments

Helps improve equipment automation level and maintenance efficiency

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218