Gasonics 001-0000-39处理传输模块

Gasonics 001-0000-39处理传输模块

1.产 品 资 料 介 绍：

产品名称：

Gasonics 001-0000-39 处理传输模块（又称晶圆搬运模块）

产品概述：

该模块是 Gasonics 等离子体设备中用于晶圆自动搬运的核心部件之一，常用于 Aura、L3510 等型号的等离子清洗或去胶设备中。其主要功能是将晶圆在载片台、处理腔室及缓冲区域之间精确搬运，支持设备的自动化运行。

应用领域：

1. 半导体晶圆搬运自动化

   • 在等离子清洗、光刻胶剥离等工艺流程中，实现晶圆从输入端到处理腔再到输出端的自动传输。

2. 等离子体工艺设备内部传输系统

   • 保证晶圆在多工艺腔体间的高效流转，提高设备整体处理效率。

3. 设备升级与维护

   • 替代原有传输模块，提升搬运精度与运行稳定性，减少人为操作干预。

4. 高洁净环境下的晶圆处理

   • 设计适用于洁净室，支持无颗粒搬运，避免污染晶圆表面。

产品优势：

• 定位精度高：确保晶圆准确对位于目标平台或腔体

• 动作可靠性强：适合长时间运行的生产环境

• 兼容性好：可直接替换原厂模块，无需改装

• 维护便捷：模块化设计，便于快速更换和维护

英文资料：

Product Name:

Gasonics 001-0000-39 Processing and Transport Module (also known as Wafer Handling Module)

Product Overview:

This module is one of the core components used for automatic wafer handling in Gasonics plasma equipment, commonly used in plasma cleaning or de gluing equipment such as Aura and L3510 models. Its main function is to accurately transport wafers between the wafer stage, processing chamber, and buffer area, supporting the automated operation of the equipment.

Application areas:

Semiconductor wafer handling automation

In processes such as plasma cleaning and photoresist stripping, automatic transfer of wafers from the input end to the processing chamber and then to the output end is achieved.

Internal transmission system of plasma process equipment

Ensure efficient flow of wafers between multiple process chambers and improve overall processing efficiency of the equipment.

Equipment upgrade and maintenance

ｒｅｐｌａｃｅ the original transmission module, improve handling accuracy and operational stability, and reduce human intervention.

Wafer Processing in High Cleanliness Environment

Designed for cleanrooms, supports particle free handling, and avoids contaminating wafer surfaces.

Product advantages:

High positioning accuracy: ensuring that the wafer is accurately positioned on the target platform or cavity

Strong action reliability: suitable for long-term production environments

Good compatibility: can directly ｒｅｐｌａｃｅ the original module without modification

Convenient maintenance: modular design for quick replacement and maintenance

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218