Gasonics 908-061N-R控制器
1.产 品 资 料 介 绍:
Gasonics 908-061N-R 控制器 — 产品应用领域
该控制器主要用于 Gasonics 等离子体清洗设备中的紫外灯管管理,属于关键工艺辅助模块。其产品应用领域包括:
半导体制造工艺
用于晶圆表面等离子体剥离、清洗工序中的紫外灯管点亮与调控,保证等离子体源稳定,提升剥离效率和一致性。显示面板制造
在 AMOLED、LCD 等显示器生产中,控制紫外灯管的启停,确保薄膜层均匀剥离与表面处理质量。微电子器件加工
通过精确控制紫外光源,辅助微细加工设备实现高精度的光刻胶去除和表面清洁。科研及定制化等离子体设备
用于实验室或特殊应用设备中,负责控制紫外灯管工作状态,配合工艺参数调整。
该控制器确保灯管安全可靠点亮,减少故障率,提高设备运行的稳定性和工艺良率。若灯管控制异常,可能引起工艺不均匀或设备停机,故此控制器在设备运行中起到重要保障作用。
英文资料:
Gasonics 908-061N-R Controller - Product Application Fields
This controller is mainly used for the management of ultraviolet lamps in Gasonics plasma cleaning equipment and is a key process auxiliary module. Its product application areas include:
Semiconductor manufacturing process
Used for lighting and regulating ultraviolet lamps in plasma stripping and cleaning processes on wafer surfaces, ensuring stable plasma sources and improving stripping efficiency and consistency.
Display panel manufacturing
In the production of AMOLED, LCD and other displays, control the start and stop of ultraviolet lamps to ensure uniform peeling of thin film layers and surface treatment quality.
Microelectronics Device Processing
By precisely controlling the ultraviolet light source, high-precision photoresist removal and surface cleaning can be achieved with the assistance of microfabrication equipment.
Research and customized plasma equipment
Used in laboratories or special application equipment, responsible for controlling the working status of ultraviolet lamps and adjusting process parameters.
This controller ensures the safe and reliable lighting of the lamp tube, reduces the failure rate, and improves the stability of equipment operation and process yield. If the lamp control is abnormal, it may cause uneven process or equipment shutdown, so the controller plays an important role in ensuring the operation of the equipment.
2.产 品 展 示
3.其他产品
4.其他英文产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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