Gasonics 95-0296 B触摸屏显示器
1.产 品 资 料 介 绍:
一、产品概述
Gasonics 95-0296 B 是一款用于 Gasonics 等离子处理设备上的 触摸屏显示器(Touchscreen Display),为设备操作者提供直观的人机交互界面(HMI)。该组件结合液晶显示与触摸操作功能,可用于参数设定、状态监控、报警查看和设备操作等,是控制面板的核心部件之一。
二、技术参数简述(典型配置)
项目 | 参数说明 |
---|---|
型号 | 95-0296 B |
类型 | 触摸式 LCD 显示器模块 |
显示类型 | LCD 液晶屏(可能为灰阶或彩色) |
操作方式 | 电阻式/电容式触摸屏(具体视版本) |
接口形式 | 与主控板通信(串口或专用接口) |
安装方式 | 面板嵌入式安装 |
兼容设备 | Gasonics Aura、PEP 系列等机型 |
三、应用场景
1. 等离子剥离设备(Plasma Asher)
用于控制设备运行、参数调整(气体流量、RF功率、真空度等);
实时显示工艺流程、设备状态、报警信息;
支持本地操作和菜单导航。
2. 等离子清洗与表面活化设备
用户可通过触摸屏设定清洗时间、气体配比、等离子密度等关键工艺参数;
提供程序选择、配方管理功能。
3. 负载锁系统控制界面
显示负载锁(Loadlock)腔体状态,控制样片上下片动作;
实现与真空阀门、升降电梯的联动控制。
4. 设备维护与故障诊断
显示系统运行日志、故障代码与维护指引;
支持技术人员进行系统初始化、测试和调试。
英文资料:
1、 Product Overview
Gasonics 95-0296 B is a touchscreen display used on Gasonics plasma processing equipment, providing an intuitive human-machine interface (HMI) for device operators. This component combines LCD display and touch operation functions, and can be used for parameter setting, status monitoring, alarm viewing, and device operation. It is one of the core components of the control panel.
2、 Technical parameter description (typical configuration)
Project parameter description
Model 95-0296 B
Type Touch LCD Display Module
Display type: LCD screen (may be grayscale or color)
Operation mode: resistive/capacitive touch screen (depending on the version)
Interface form for communication with the main control board (serial port or dedicated interface)
Installation method: panel embedded installation
Compatible with Gasonics Aura, PEP series and other models
3、 Application scenarios
1. Plasma Asher equipment
Used for controlling equipment operation, parameter adjustment (gas flow rate, RF power, vacuum degree, etc.);
Real time display of process flow, equipment status, and alarm information;
Support local operations and menu navigation.
2. Plasma cleaning and surface activation equipment
Users can set key process parameters such as cleaning time, gas ratio, and plasma density through the touch screen;
Provide program selection and recipe management functions.
3. Load lock system control interface
Display the status of the Load Lock chamber and control the movement of the sample piece up and down;
Realize linkage control with vacuum valves and elevators.
4. Equipment maintenance and fault diagnosis
Display system operation logs, fault codes, and maintenance guidelines;
Support technical personnel for system initialization, testing, and debugging.
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218