Gasonics 94-2806机器人手臂模块

 Gasonics 94-2806机器人手臂模块

1.产 品 资 料 介 绍：

一、产品概述

Gasonics 94-2806 是一款用于 Gasonics 等离子处理设备中的 机器人手臂模块，主要用于晶圆或工件在设备内部的自动搬运与对位操作。该模块集成了机械结构、驱动组件（如伺服电机）、传感器系统及与主控系统的接口，能够在真空或洁净室环境中高精度地完成晶圆上下片、旋转、移载等动作，是实现全自动化运行的关键部件之一。

二、应用领域

1. 等离子剥离/清洗设备

• 用于晶圆在主处理腔体与负载锁（Loadlock）之间的自动搬运；

• 减少人为干预，提高系统产能和洁净度。

2. 前道晶圆加工设备

• 在光刻、刻蚀、沉积等流程前后搬运晶圆，确保流程衔接；

• 可搭配Gasonics Aura、PEP系列等设备。

3. 半导体封装测试自动化

• 将裸晶或封装芯片从载具中抓取并准确放置至测试平台；

• 提高操作精度，降低误差和损耗率。

4. 科研与工艺开发平台

• 适用于高校、研究机构等R&D系统中需要高洁净度操作的场合；

• 实现不同实验条件下的样品自动转移。

英文资料：

1、 Product Overview

Gasonics 94-2806 is a robotic arm module used in Gasonics plasma processing equipment, mainly for automatic handling and alignment of wafers or workpieces inside the equipment. This module integrates mechanical structures, drive components (such as servo motors), sensor systems, and interfaces with the main control system, enabling high-precision wafer loading and unloading, rotation, and transfer in vacuum or clean room environments. It is one of the key components for achieving fully automated operation.

2、 Application Fields

1. Plasma stripping/cleaning equipment

Used for automatic handling of wafers between the main processing chamber and the load lock;

Reduce human intervention, improve system productivity and cleanliness.

2. Front wafer processing equipment

Transport wafers before and after photolithography, etching, deposition, and other processes to ensure seamless integration;

Can be paired with Gasonics Aura, PEP series and other equipment.

3. Automation of semiconductor packaging testing

Capture and accurately place bare or packaged chips from the carrier onto the testing platform;

Improve operational accuracy, reduce errors and loss rates.

4. Research and process development platform

Suitable for situations where high cleanliness is required in R&D systems such as universities and research institutions;

Realize automatic transfer of samples under different experimental conditions.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218