Gasonics C12101 RMS-0069变压器

 Gasonics  C12101 RMS-0069变压器

1.产 品 资 料 介 绍：

一、产品概述

Gasonics C12101（同编号 RMS-0069）是一款用于 Gasonics 等离子处理设备中的电源变压器模块，主要功能是将输入电源电压转换为设备内部所需的多路稳定工作电压，通常用于驱动控制系统、RF射频模块、真空组件、传感器等关键单元。该变压器设计符合工业级隔离与耐压要求，适用于长期运行环境。

二、应用领域

1. 等离子体清洗与剥离设备（如 Gasonics Aura / PEP 系列）

• 为主控制系统、电源驱动模块、气路控制板等提供电压转换；

• 提供稳定交流或直流输出，支撑核心功能单元运行。

2. RF 射频电源系统

• 向射频发生器提供隔离电源，保障等离子体稳定激发；

• 降低射频干扰对其他系统的影响。

3. 负载锁和机器人控制系统

• 向电磁阀、马达控制板等执行部件供电；

• 实现载片流程的自动化控制和互锁运行。

英文资料：

1、 Product Overview

Gasonics C12101 (also known as RMS-0069) is a power transformer module used in Gasonics plasma processing equipment. Its main function is to convert the input power voltage into multiple stable operating voltages required by the equipment. It is commonly used to drive key units such as control systems, RF modules, vacuum components, sensors, etc. This transformer is designed to meet industrial grade isolation and withstand voltage requirements, and is suitable for long-term operating environments.

2、 Application Fields

1. Plasma cleaning and stripping equipment (such as Gasonics Aura/PEP series)

Provide voltage conversion for the main control system, power drive module, air circuit control board, etc;

Provide stable AC or DC output to support the operation of core functional units.

2. RF power supply system

Provide isolated power supply to the RF generator to ensure stable plasma excitation;

Reduce the impact of radio frequency interference on other systems.

3. Load lock and robot control system

Supply power to actuating components such as solenoid valves and motor control boards;

Implement automated control and interlocking operation of the wafer loading process.

2.产      品      展      示      

3.其他产品

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 61-0475-21轴运动控制板

Siemens 6ES7307-1EA01-0AA0 电源模块

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3BHE009681R0101 GVC750BE101 thyristor hi

ABB 3DDE300410 Display

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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