Gasonics A89-013-01接口控制面板
1.产 品 资 料 介 绍：
一、产品概述
Gasonics A89-013-01 是一款用于 Gasonics 等离子设备（如 Aura、PEP 系列）中的 接口控制面板（Interface Control Panel），用于设备操作、状态显示、信号交互与本地控制功能整合。该面板一般集成了物理按键、指示灯、通信接口以及显示模块，作为设备与用户或维护工程师之间的人机交互接口，起到协调系统功能与执行操作命令的重要作用。
二、应用领域
1. 等离子体处理系统（Plasma Asher / Cleaner）
本地控制 RF 电源、真空腔、升降平台、气体流量等关键子系统；
显示设备运行状态、报警提示、工艺流程信息等。
2. 负载锁和搬运平台
提供手动控制与互锁解除按钮，便于维护和调试；
与主控制主板连接，实现 IO 状态反馈与命令下发。
3. 安全互锁与系统测试接口
包含紧急停止（EMO）、门锁控制、启动/复位按钮等；
适用于设备调试、测试和故障处理阶段的手动控制操作。
英文资料：
1、 Product Overview
Gasonics A89-013-01 is an Interface Control Panel used in Gasonics plasma equipment (such as Aura, PEP series) for integrating equipment operation, status display, signal interaction, and local control functions. This panel generally integrates physical buttons, indicator lights, communication interfaces, and display modules, serving as a human-machine interaction interface between the device and the user or maintenance engineer, playing an important role in coordinating system functions and executing operational commands.
2、 Application Fields
1. Plasma treatment system (Plasma Asher/Cleaner)
Local control of key subsystems such as RF power supply, vacuum chamber, lifting platform, gas flow rate, etc;
Display device operating status, alarm prompts, process flow information, etc.
2. Load lock and handling platform
Provide manual control and interlock release buttons for easy maintenance and debugging;
Connect to the main control board to achieve IO status feedback and command issuance.
3. Security interlock and system testing interface
Includes emergency stop (EMO), door lock control, start/reset buttons, etc;
Suitable for manual control operations during equipment debugging, testing, and troubleshooting phases.
2.产 品 展 示
3.其他产品
Siemens 6ES7307-1EA01-0AA0 电源模块
4.其他英文产品
ASEA 57310256-BA circuit board
GESVDU-1D-8946 Input/Output Module
| 6ES5243-1AA13 | CACR-HR20BBC | TRICONEX 4508 |
| 6ES5242-5AB21 | 6SC6506-0AA02 | PCD235A101 |
| 6ES5242-1AA32 | CACR-IR10SB | UNITROL 1010 |
| 6ES5241-1AD12 | 6SC6111-5DA00 | TRICONEX 3005 |
| 6ES5240-5AA31 | 6SC6500-0NA44 | SSA-G1018-0652 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
