Gasonics A89-030-01加载锁接口板

 Gasonics  A89-030-01加载锁接口板

1.产 品 资 料 介 绍：

一、产品概述

Gasonics A89-030-01 是 Gasonics 等离子设备（如 Aura 或 PEP 系列）中的关键子模块——加载锁接口板（Loadlock Interface Board），专为控制和协调设备的 Loadlock（负载锁）腔体运行而设计。该接口板主要负责接收来自主控制系统的指令，并控制 Loadlock 腔体内的泵浦、充气、电磁阀、门锁机构及相关传感器反馈，实现晶圆的自动上片/下片流程。

二、应用领域

1. 半导体设备的 Loadlock 子系统

• 控制 Loadlock 腔体的真空抽气与背压充气；

• 管理机械臂与升降平台之间的晶圆交接逻辑。

2. Gasonics Plasma Asher / Cleaner 系统

• 用于在等离子处理前后完成晶圆装载和卸载；

• 联动主系统控制 RF 启动前的安全检查与门控逻辑。

3. 设备安全互锁控制

• 控制腔体门开/关互锁机制；

• 监测压力传感器、门状态、腔体真空等信号，实现自动判断。

英文资料：

1、 Product Overview

Gasonics A89-030-01 is a key submodule in Gasonics plasma equipment (such as Aura or PEP series) - the Loadlock Interface Board, designed specifically for controlling and coordinating the operation of the device's Loadlock chamber. This interface board is mainly responsible for receiving instructions from the main control system, and controlling the pump, inflation, solenoid valve, door lock mechanism, and related sensor feedback inside the Loadlock cavity to achieve automatic wafer loading/unloading process.

2、 Application Fields

1. Loadlock subsystem of semiconductor equipment

Control the vacuum pumping and back pressure inflation of the Loadlock chamber;

Manage the wafer handover logic between the robotic arm and the lifting platform.

2. Gasonics Plasma Asher/Cleaner System

Used to complete wafer loading and unloading before and after plasma treatment;

The safety check and gate control logic before RF startup are controlled by the linkage main system.

3. Equipment safety interlock control

Control the interlocking mechanism for opening/closing the chamber door;

Monitor signals such as pressure sensors, door status, and chamber vacuum to achieve automatic judgment.

2.产      品      展      示      

3.其他产品

 851-8833-001A控制器主板

 68-0061-10单板计算机

jetter JM-204-480-JC310-S1伺服驱动器

4.其他英文产品

AMAT 0190-11415 Digital Input Module

ABB XVC768117 Field Input/Output Module

RADISYS 85-250V power module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218