Gasonics A-2000LL 94-2807升降器控制板

 Gasonics  A-2000LL 94-2807升降器控制板

1.产 品 资 料 介 绍：

一、产品概述

Gasonics A-2000LL（型号94-2807） 是专用于等离子处理设备中负载锁腔体的 升降器控制板（Lift Control Board）。该控制板负责驱动和管理负载锁内升降机构的运动，实现晶圆的垂直升降、定位与安全联锁。它通过接收主控制器的指令，协调电机驱动、限位开关和位置反馈传感器，确保晶圆搬运过程平稳精准。

二、应用领域

1. 半导体等离子设备负载锁系统

• 控制负载锁腔内晶圆托盘或升降平台的升降动作；

• 实现与机械手臂、真空门等设备的联动，完成自动化上下片流程。

2. 自动化晶圆处理设备

• 在高洁净度环境下保证升降机构运行稳定、可靠；

• 提供安全保护功能，防止超程、错动作。

英文资料：

1、 Product Overview

Gasonics A-2000LL (model 94-2807) is a Lift Control Board specifically designed for load lock chambers in plasma processing equipment. This control board is responsible for driving and managing the movement of the lifting mechanism inside the load lock, achieving vertical lifting, positioning, and safety interlocking of the wafer. It receives instructions from the main controller, coordinates motor drives, limit switches, and position feedback sensors to ensure a smooth and accurate wafer handling process.

2、 Application Fields

1. Load lock system for semiconductor plasma equipment

Control the lifting action of the wafer tray or lifting platform inside the load lock chamber;

Realize linkage with mechanical arms, vacuum doors, and other equipment to complete automated loading and unloading processes.

2. Automated wafer processing equipment

Ensure stable and reliable operation of the lifting mechanism in a high cleanliness environment;

Provide safety protection function to prevent overtravel and misoperation.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218