Gasonics 90-1028-01可编程压力模块

 Gasonics  90-1028-01可编程压力模块

1.产 品 资 料 介 绍：

一、产品概述

Gasonics 90-1028-01 是专为等离子处理设备设计的 可编程压力模块，用于实时监测和控制设备腔体内的压力参数。该模块集成了高精度压力传感器和可编程控制单元，能够根据预设参数自动调节腔体压力，保证工艺环境的稳定性和重复性。适用于多种气体环境，支持数字接口与主控系统通信。

二、应用领域

1. 等离子剥离与蚀刻设备

• 实时调节和监测反应腔体压力，确保工艺精度；

• 支持多阶段压力曲线控制，实现复杂工艺需求。

2. 负载锁和真空系统

• 控制腔体真空度，协调真空泵与气体阀门的运行；

• 防止压力异常导致设备故障或工艺失效。

3. 半导体制造自动化设备

• 与主控系统集成，支持远程参数设定与状态监测；

• 保证工艺环境的安全和稳定。

英文资料：

1、 Product Overview

Gasonics 90-1028-01 is a programmable pressure module designed specifically for plasma processing equipment, used for real-time monitoring and control of pressure parameters inside the equipment chamber. This module integrates high-precision pressure sensors and programmable control units, which can automatically adjust the chamber pressure according to preset parameters, ensuring the stability and repeatability of the process environment. Suitable for various gas environments, supporting digital interface and communication with the main control system.

2、 Application Fields

1. Plasma stripping and etching equipment

Real time adjustment and monitoring of reaction chamber pressure to ensure process accuracy;

Support multi-stage pressure curve control to meet complex process requirements.

2. Load lock and vacuum system

Control the vacuum degree of the chamber and coordinate the operation of the vacuum pump and gas valve;

Prevent equipment failure or process failure caused by abnormal pressure.

3. Semiconductor manufacturing automation equipment

Integrated with the main control system, supporting remote parameter setting and status monitoring;

Ensure the safety and stability of the process environment.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218