Gasonics A90-031-03 故障检测模块

 Gasonics  A90-031-03 故障检测模块

1.产 品 资 料 介 绍：

一、产品概述

Gasonics A90-031-03 是专为 Gasonics 等离子设备设计的 故障检测模块，用于实时监控设备各子系统的运行状态，及时发现并报告故障信号。该模块通过采集传感器数据和控制信号，分析异常情况并触发报警，保障设备安全稳定运行，减少意外停机时间，提高生产效率。

二、应用领域

1. 等离子剥离与清洗设备

• 监控射频电源、电磁阀、气体流量、真空泵等关键部件的工作状态；

• 实现自动故障识别与报警，支持维护人员快速定位问题。

2. 自动化晶圆搬运系统

• 检测机器人手臂、电机驱动和升降平台等执行机构的异常；

• 确保搬运过程安全，防止晶圆损坏。

3. 设备整体安全管理

• 联动系统互锁逻辑，执行紧急停机或故障保护；

• 记录故障日志，便于后续分析和维护。

英文资料：

1、 Product Overview

Gasonics A90-031-03 is a fault detection module designed specifically for Gasonics plasma equipment, used for real-time monitoring of the operating status of various subsystems of the equipment, timely detection and reporting of fault signals. This module collects sensor data and control signals, analyzes abnormal situations, and triggers alarms to ensure the safe and stable operation of equipment, reduce unexpected downtime, and improve production efficiency.

2、 Application Fields

1. Plasma stripping and cleaning equipment

Monitor the working status of key components such as RF power supply, solenoid valve, gas flow, vacuum pump, etc;

Realize automatic fault recognition and alarm, and support maintenance personnel to quickly locate problems.

2. Automated wafer handling system

Detect anomalies in robot arms, motor drives, and lifting platforms and other actuators;

Ensure the safety of the handling process and prevent wafer damage.

3. Overall safety management of equipment

Interlocking logic of the linkage system, executing emergency shutdown or fault protection;

Record fault logs for subsequent analysis and maintenance.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218