Gasonics 885-2423手臂控制板
1.产 品 资 料 介 绍：
产品名称：Gasonics 885-2423 手臂控制板
部件类型：机械臂控制电路板（Robot Arm Controller PCB）
主要功能：用于控制设备内部搬运机械臂（Transfer Arm / Robot Arm）的运动行为，实现晶圆在各工艺区域之间的自动传输
一、机械手臂驱动与控制
该控制板作为核心控制单元，协调伺服电机、步进驱动器、位置传感器等部件的运行，实现晶圆的精准取放与移动。
典型控制功能：
晶圆拾取 / 放置动作控制
手臂水平 / 垂直运动指令发送
夹持装置开闭控制
动作路径规划与位置校准
二、信号输入输出接口
控制板与传感器和执行器之间建立多路信号交互，包括位置反馈、动作确认、限位保护等，确保搬运过程安全可靠。
接口支持：
多轴电机驱动信号
编码器/限位开关反馈输入
运动完成与错误信号反馈
上位系统通信接口（如 TTL、RS-232）
三、设备自动化系统集成
885-2423 控制板通常集成于 Gasonics 等离子设备或其他晶圆处理平台中，配合主控制器共同完成工艺流程中的物料搬运任务。
常见搭配部件：
控制主板（如 ABX-88919-41-1）
步进驱动器（如 RD-323M10）
光学传感器（如 A89-004-01）
英文资料：
Product Name: Gasonics 885-2423 Arm Control Board
Component type: Robot Arm Controller PCB
Main function: Used to control the movement behavior of the internal transfer arm (Transfer Arm/Robot Arm) of the equipment, achieving automatic transfer of wafers between various process areas
1、 Mechanical arm drive and control
This control board serves as the core control unit, coordinating the operation of servo motors, stepper drivers, position sensors, and other components to achieve precise wafer picking, placing, and movement.
Typical control functions:
Wafer picking/placing action control
Sending commands for arm horizontal/vertical movement
Clamping device opening and closing control
Action path planning and position calibration
2、 Signal input/output interface
Establish multi-channel signal interaction between the control board, sensors, and actuators, including position feedback, action confirmation, limit protection, etc., to ensure the safety and reliability of the handling process.
Interface support:
Multi axis motor drive signal
Encoder/limit switch feedback input
Movement completion and error signal feedback
Communication interface of upper system (such as TTL, RS-232)
3、 Equipment automation system integration
The 885-2423 control board is usually integrated into Gasonics plasma equipment or other wafer processing platforms, working together with the main controller to complete material handling tasks in the process flow.
Common matching components:
Control motherboard (such as ABX-88919-41)
Stepper driver (such as RD-323M10)
Optical sensors (such as A89-004-01)
2.产 品 展 示
3.其他产品
4.其他英文产品
A-B 1794-IRT8XT Relay Output Module
ABB XXD129A01 Card Module Controller
| UR8AH | CACR-HR10BAB | 4598-006-60813 |
| UR6UH | CACR-SK300AAB, | 067-02121-0003 |
| UR6TH | CACR-SR20SB1BF-Y100 | 0660-01847 |
| UR6PH | CACR-IR44SFB | EXP-MX250 |
| UR6EV | CACR-R44SFB | 97-9045-01 |
| UR6DH | CACR-CSL20DL16AAA | 60-0208-03 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
