Gasonics 90-2516迷你控制器模块
1.产 品 资 料 介 绍：
产品名称
Gasonics 90-2516 迷你控制器模块
一、产品概述
Gasonics 90-2516 是一款用于等离子清洗设备的小型控制器模块，具备对质量流量控制器（MFC）或质量流量计（MFM）信号进行采集与调节的功能，同时具备微波信号控制接口。该模块用于实现气体流量控制与等离子体激励的联动控制，是 Gasonics Aura 系列系统中的关键部件之一。
二、技术参数
模块类型：迷你控制器模块（Mini Controller）
功能支持：MFC/MFM 接口信号处理 + 微波信号控制
接口类型：模拟信号输入/输出 + 数字控制信号传输
安装方式：PCB 插卡式，插入背板或主控系统
指示系统：板载状态指示灯（视具体版本而定）
工作环境：适用于工业级高干扰等离子设备环境
三、应用场景
用于 Gasonics 等离子设备中的气体流量控制
联动微波信号控制，用于激发或调节等离子体强度
作为信号转换桥梁，将模拟输入信号转换为数字控制
替代损坏模块，维持设备精密控制功能
英文资料：
product name
Gasonics 90-2516 Mini Controller Module
1、 Product Overview
Gasonics 90-2516 is a small controller module for plasma cleaning equipment, which has the function of collecting and adjusting signals from mass flow controllers (MFC) or mass flow meters (MFM), and also has a microwave signal control interface. This module is used to achieve the linkage control of gas flow control and plasma excitation, and is one of the key components in the Gasonics Aura series system.
2、 Technical parameters
Module type: Mini Controller module
Function support: MFC/MFM interface signal processing+microwave signal control
Interface type: Analog signal input/output+digital control signal transmission
Installation method: PCB plug-in card, inserted into the backplane or main control system
Indicator system: onboard status indicator light (depending on specific version)
Work environment: Suitable for industrial grade high interference plasma equipment environment
3、 Application scenarios
Gas flow control for Gasonics plasma equipment
Linkage microwave signal control, used to excite or regulate plasma intensity
As a signal conversion bridge, it converts analog input signals into digital control
ｒｅｐｌａｃｅ damaged modules and maintain precise control function of equipment
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA DSQC223 Robot Control Board
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| PMA24C-00100-00 | AMAT 0100-20060 | PFEA113-65 3BSE050092R65 |
| PMA240-1150B-02 | AMAT 0100-00127 | PFTL101A-0.5KN 3BSE004166R1 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
