Gasonics 17382-01温度控制
1.产 品 资 料 介 绍：
产品名称
Gasonics 17382-01 温度控制模块
一、产品概述
Gasonics 17382-01 是一款专用于 Gasonics 等离子体清洗设备的温度控制模块，广泛应用于 Aura 3000、3010 和 L3510 等系列中。该模块用于对设备内部多个加热点（如腔体、工艺平台或热板）进行精准温度监控和闭环调节，确保工艺稳定性。
二、技术参数
控制方式：闭环温控，可能基于 PID 算法
信号输入：热电偶（如 K 型）温度信号采集
输出类型：模拟或数字信号输出至加热器控制回路
报警功能：具备高低温报警与故障反馈能力
安装形式：模块化设计，插板或底座固定式
兼容系统：Gasonics Aura 3000 / 3010 / L3510
三、应用场景
控制等离子腔体或载物台温度
实时调节加热器输出，防止过热或温漂
保证光刻胶灰化或干法清洗等温敏工艺的热稳定性
与主控系统联动，用于设备的温度记录与安全控制
英文资料：
product name
Gasonics 17382-01 Temperature Control Module
1、 Product Overview
Gasonics 17382-01 is a temperature control module specifically designed for Gasonics plasma cleaning equipment, widely used in series such as Aura 3000, 3010, and L3510. This module is used for precise temperature monitoring and closed-loop adjustment of multiple heating points inside the device, such as chambers, process platforms, or hot plates, to ensure process stability.
2、 Technical parameters
Control method: closed-loop temperature control, possibly based on PID algorithm
Signal input: thermocouple (such as K-type) temperature signal acquisition
Output type: Analog or digital signal output to heater control circuit
Alarm function: capable of high and low temperature alarm and fault feedback
Installation form: modular design, plug-in or base fixed type
Compatible systems: Gasonics Aura 3000/3010/L3510
3、 Application scenarios
Control the temperature of the plasma chamber or stage
Real time adjustment of heater output to prevent overheating or temperature drift
Ensure the thermal stability of temperature sensitive processes such as photoresist ashing or dry cleaning
Linked with the main control system, used for temperature recording and safety control of equipment
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
