Gasonics 212689-AN1手臂控制器

 Gasonics  212689-AN1手臂控制器

1.产 品 资 料 介 绍：

产品概述

Gasonics 212689-AN1 手臂控制器是一种用于等离子清洗设备中机械臂或传送机构的驱动控制模块，主要负责晶圆在处理过程中的自动搬运、定位与传送。该控制器通常集成于 Gasonics Aura 系列等离子设备中，保障晶圆在工艺腔体间的平稳移动。

技术参数

• 型号：212689-AN1

• 控制类型：伺服控制或步进电机驱动（具体依赖配套电机类型）

• 控制对象：晶圆搬运机械臂 / Transfer Arm

• 输入信号：主控制系统下发的动作指令信号（如启动、停止、位置命令）

• 输出信号：电机驱动、电源控制、位置反馈信号等

• 安装方式：模块化机架安装，连接机械臂与主控制系统

• 电气接口：标准多芯连接器，适配机臂反馈与电源系统

• 适用设备：Gasonics Aura 1000 / Aura 2000 / Aura 3010 等等离子清洗设备

应用场景

1. 晶圆传送控制
   控制晶圆在 Cassette、Loadlock 与工艺腔体之间的自动搬运，确保精准对位与平稳传送。

2. 与真空系统联动
   与真空舱门控制系统同步工作，确保搬运动作只在安全气压条件下执行。

3. 多轴联动操作
   控制机械臂的旋转、伸缩、升降等多个自由度动作，适应不同腔体结构与晶圆路径。

4. 系统启动初始化校准
   在设备启动时执行机械臂归零、定位校准动作，保证搬运精度和重复性。

英文资料：

product overview

The Gasonics 212689-AN1 arm controller is a drive control module used for robotic arms or transfer mechanisms in plasma cleaning equipment, mainly responsible for automatic handling, positioning, and transfer of wafers during processing. This controller is typically integrated into Gasonics Aura series plasma equipment to ensure smooth movement of wafers between process chambers.

Technical Parameter

Model: 212689-AN1

Control type: servo control or stepper motor drive (depending on the matching motor type)

Control object: Wafer handling robotic arm/Transfer Arm

Input signal: Action command signal issued by the main control system (such as start, stop, position command)

Output signals: motor drive, power control, position feedback signal, etc

Installation method: Modular rack installation, connecting the robotic arm to the main control system

Electrical interface: standard multi-core connector, compatible with arm feedback and power supply system

Applicable equipment: Gasonics Aura 1000/Aura 2000/Aura 3010 plasma cleaning equipment, etc

Application scenarios

Wafer transfer control

Control the automatic handling of wafers between Cassette, Loadlock, and process chambers to ensure precise alignment and smooth transfer.

Linkage with vacuum system

Synchronize with the vacuum door control system to ensure that handling actions are only performed under safe air pressure conditions.

Multi axis linkage operation

Control the rotation, extension, lifting, and other multiple degrees of freedom movements of the robotic arm to adapt to different cavity structures and wafer paths.

System startup initialization calibration

Perform robotic arm zeroing and positioning calibration actions during device startup to ensure handling accuracy and repeatability.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218