AMAT Applied Materials 0720-05235水阀组件
1.产 品 资 料 介 绍：
AMAT Applied Materials 0720-05235 水阀组件
核心规格
功能特点
典型应用
AMAT Applied Materials 0720-05235水阀组件 英文资料：
AMAT Applied Materials 0720-05235 Water Valve Component
AMAT 0720-05235 is a high-precision water valve component designed specifically for semiconductor manufacturing equipment, mainly used for flow control and switch operation of process cooling systems, compatible with platforms such as Centura, Endura, P5000, etc.
Core specifications
Project specification remarks
Suitable for multi chamber wafer manufacturing systems such as Centura, Endura, P5000, etc
Valve type electric/pneumatic control valve normally closed/normally open optional
Control mode: Analog 0-10 V/4-20 mA or digital signal supports proportional adjustment
The nominal diameter of 1/4 "-1" depends on the specific model
Working pressure 0.2-1.0 MPa, maximum pressure resistance up to 1.6 MPa
Working temperature range of 5-60 ° C, suitable for cooling media such as deionized water
The compatibility of DI water and ethylene glycol solution (≤ 50%) depends on the sealing material
Connection method card sleeve VCR、 Flange standard interface design
IP65 protection level suitable for internal installation of equipment
Features
High precision flow control: using proportional control technology to achieve precise adjustment of flow rate
Quick response: Short response time ensures that the cooling system quickly adapts to process changes
Low leakage design: special sealing structure ensures long-term reliable operation
Corrosion resistant material: The valve body is made of stainless steel or engineering plastic, suitable for semiconductor environments
Status monitoring: Some models are equipped with position feedback sensors for remote monitoring
Safe and reliable: equipped with manual emergency operation function, improving system security
Typical Applications
Process chamber temperature control circuit
Electrostatic Chuck (ESC) Cooling System
RF power supply and matching network cooling
Cooling of vacuum system components
Temperature control of other key components of the equipment
AMAT Applied Materials 0720-05235水阀组件 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
