AMAT Applied Materials 0100-35207主机联锁模块
1.产 品 资 料 介 绍：
AMAT Applied Materials 0100-35207 主机联锁模块
核心规格
功能特点
AMAT Applied Materials 0100-35207主机联锁模块 英文资料：
AMAT Applied Materials 0100-35207 Host Interlocking Module
AMAT 0100-35207 is a high reliability host interlocking module designed specifically for semiconductor manufacturing equipment. It is mainly used for monitoring equipment safety status, implementing emergency stop protection, and multi system interlocking control. It is compatible with platforms such as Centura, Endura, P5000, etc.
Core specifications
Project specification remarks
Suitable for multi chamber wafer manufacturing systems such as Centura, Endura, P5000, etc
Interlocking input with 32 safety inputs (dry contact/wet contact) supports emergency stop, door switch, pressure monitoring, etc
Interlocking output 16 safety relay outputs can drive alarm, shutdown, isolation and other devices
Response time ≤ 10ms to ensure rapid response in emergency situations
Safety level SIL 2/PL d complies with semiconductor industry safety standards
Communication interface RS-485, Ethernet supports secure status upload
Operating temperature range of 0 ℃ to 50 ℃, industrial grade environmental adaptability
24VDC dual redundancy power supply improves system reliability
The standard external dimensions are 3U rack mounted, which facilitates system integration
Features
Multiple safety interlocks: Integrated monitoring of multiple types of safety signals such as emergency stop, door status, pressure, temperature, etc
Quick response mechanism: millisecond level fault response to ensure rapid cut-off of hazardous energy in emergency situations
Safety redundancy design: Dual redundancy of critical circuits to avoid single point failure causing safety function failure
Real time monitoring of status: Upload the status of all interlocking points through the communication interface for remote diagnosis
Fault memory function: Record the last fault status to assist in quickly troubleshooting problems
Manual reset mechanism: After troubleshooting, manual reset is required to prevent accidental startup
AMAT Applied Materials 0100-35207主机联锁模块 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
