CVM201GBA-11真空计

CVM201GBA-11真空计 

1.产 品 资 料 介 绍：

CVM201GBA-11真空计产品说明

CVM201GBA-11是InstruTech推出的对流增强型皮拉尼真空计，核心定位为真空系统的压力监测与控制核心组件，具备宽量程测量、高精度显示、多接口通信及强环境适配性等特点，可实现从大气压到高真空环境的连续压力监测，且能直接替换Granville-Phillips® Mini-Convectron®模块，广泛适配工业制造、科研实验等多场景的真空系统需求。产品特点如下：

一、产品特点

- 宽量程高精度测量：测量范围覆盖1×10⁻⁴ torr至1000 torr（对应1.3×10⁻² Pa至133 kPa），可实现从高真空到大气压的全范围连续监测；不同量程下精度优异，1×10⁻⁴至1×10⁻³ torr量程分辨率达0.1 mtorr，400至1000 torr量程精度达±2.5%读数，保障压力数据精准可靠；

- 直观OLED显示与操作：配备高亮4位OLED数字显示屏，支持torr、mbar、Pa三种单位一键切换，不同量程下自动适配显示位数，读数清晰直观；集成便捷用户界面，可直接完成参数设置与运行操作，简化现场调试流程；

- 多接口与灵活输出：标准配置线性、对数线性、非线性三种模拟输出模式（如0-10 VDC线性输出、1-8 VDC对数线性输出等），配备2路设定点继电器，支持RS232/RS485串行通信及ASCII协议，可轻松集成于自动化控制系统，实现数据远程传输与联动控制；

- 高可靠性与强防护：采用创新温度补偿设计，将补偿组件移出真空环境，减少冗余部件与焊接点，提升运行可靠性；机械强度优化，抗冲击与振动能力优异， inlet端口内置细网筛可防止颗粒污染，且具备射频干扰屏蔽功能，适配复杂工业环境；

- 便捷替换与安装：采用即插即用设计，可直接兼容替换Granville-Phillips® Mini-Convectron®模块，软件命令完全一致，无需改动原有系统即可完成升级；内部体积小、表面积优化，可加快抽气速度并减少放气，安装与集成效率高。

二、核心应用领域

- 半导体与电子制造：适配光伏、平板显示（FPD）、半导体芯片制造等领域的真空镀膜、溅射、单晶圆处理设备，实时监测工艺腔室真空压力，保障制造工艺稳定性与产品品质；

- 工业真空设备配套：用于真空炉、真空干燥机、真空镀膜机等工业设备的真空系统，实现压力实时监控与阈值报警，避免压力波动影响生产效率与产品质量；

- 科研实验与分析仪器：适配实验室真空系统、残余气体分析仪（RGA）配套设备、真空物理实验装置等，提供高精度压力数据支撑，保障实验结果准确性；

- 真空系统升级改造：作为Granville-Phillips® Mini-Convectron®模块的低成本替代方案，广泛应用于各类原有真空系统的升级改造，在保障性能的同时降低维护与升级成本。

CVM201GBA-11真空计 英文资料：

CVM201GBA-11 Vacuum Gauge Product Description

CVM201GBA-11 is a convection enhanced Pirani vacuum gauge launched by InstruTech. Its core is positioned as the pressure monitoring and control core component of vacuum systems, with characteristics such as wide range measurement, high-precision display, multi interface communication, and strong environmental adaptability. It can achieve continuous pressure monitoring from atmospheric pressure to high vacuum environment, and can directly ｒｅｐｌａｃｅ Granville Phillips ®  Mini-Convectron ® Module, widely adaptable to vacuum system requirements in multiple scenarios such as industrial manufacturing and scientific research experiments. The product features are as follows:

1、 Product Features

-Wide range and high-precision measurement: The measurement range covers 1 × 10 ⁻⁴ torr to 1000 torr (corresponding to 1.3 × 10 ⁻² Pa to 133 kPa), enabling continuous monitoring of the entire range from high vacuum to atmospheric pressure; Excellent accuracy under different ranges, with a resolution of 0.1 mtorr for ranges from 1 × 10 ⁻⁴ to 1 × 10 ⁻ ³ torr and an accuracy of ± 2.5% for ranges from 400 to 1000 torr, ensuring accurate and reliable pressure data;

-Intuitive OLED display and operation: equipped with a high brightness 4-digit OLED digital display screen, supporting one click switching between three units: torr, mbar, and Pa, automatically adapting to display digits under different ranges, with clear and intuitive readings; Integrated and convenient user interface, which can directly complete parameter settings and operation, simplifying the on-site debugging process;

-Multi interface and flexible output: Standard configuration includes three analog output modes: linear, logarithmic linear, and nonlinear (such as 0-10 VDC linear output, 1-8 VDC logarithmic linear output, etc.), equipped with 2 set point relays, supports RS232/RS485 serial communication and ASCII protocol, and can be easily integrated into automation control systems to achieve remote data transmission and linkage control;

-High reliability and strong protection: adopting innovative temperature compensation design, removing compensation components from the vacuum environment, reducing redundant components and welding points, and improving operational reliability; Optimized mechanical strength, excellent shock and vibration resistance, built-in fine mesh screen in the inlet port to prevent particle contamination, and equipped with radio frequency interference shielding function, suitable for complex industrial environments;

-Convenient Replacement and Installation: Adopting a plug and play design, it is directly compatible with replacing Granville Phillips ®  Mini-Convectron ® The module and software commands are completely consistent, and the upgrade can be completed without changing the original system; Small internal volume and optimized surface area can accelerate pumping speed and reduce air release, with high installation and integration efficiency.

CVM201GBA-11真空计 产品展示

产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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