TURBOVAC 361涡轮分子泵

TURBOVAC 361涡轮分子泵  

1.产 品 资 料 介 绍：

1. 可实现 10⁻¹⁰ mbar 级超高真空，真空度高、稳定性强，满足高端工艺需求。
2. 氮气抽速达 345~400 L/s，抽气能力强，抽真空速度快、效率高。
3. 采用全无油润滑结构，真空环境洁净无污染，不影响样品与工艺质量。
4. 配备磁悬浮轴承，转子无机械接触磨损，运行振动极小、使用寿命长。
5. 水冷散热系统稳定可靠，可支持长期连续 24 小时运转不衰减。
6. 运行噪音低、振动小，特别适合对稳定性要求高的精密设备。
7. 支持 ISO 标准法兰接口，适配性强，可快速接入各类真空系统。
8. 可任意角度安装，布局灵活，满足不同设备结构与安装空间需求。
9. 具备过温、超速、过载、过流等完善保护，提升设备运行安全性。
10. 搭配专用驱动控制器，启停平稳、转速精准，操作与维护简便。

TURBOVAC 361涡轮分子泵  产品英文

TURBOVAC 361 is a high-performance turbo molecular pump launched by Leybold in Germany, mainly used to obtain high and ultra-high vacuum environments. It is widely used in fields such as vacuum coating, semiconductor manufacturing, scientific research laboratories, and precision analytical instruments.

Product Features

It can achieve ultra-high vacuum of 10 ⁻¹⁰ mbar level, with high vacuum degree and strong stability, meeting high-end process requirements.

The nitrogen pumping speed reaches 345-400 L/s, with strong pumping ability, fast vacuum pumping speed, and high efficiency.

Adopting a completely oil-free lubrication structure, the vacuum environment is clean and pollution-free, without affecting the quality of samples and processes.

Equipped with magnetic levitation bearings, the rotor has no mechanical contact wear, minimal operating vibration, and long service life.

The water-cooled cooling system is stable and reliable, and can support long-term continuous 24-hour operation without attenuation.

Low operating noise and minimal vibration, especially suitable for precision equipment with high stability requirements.

Supports ISO standard flange interface, strong adaptability, and can quickly connect to various vacuum systems.

Can be installed at any angle, with flexible layout to meet different equipment structures and installation space requirements.

Equipped with comprehensive protection against overheating, overspeed, overload, overcurrent, etc., to enhance the safety of equipment operation.

Paired with a dedicated drive controller, the start stop is smooth, the speed is precise, and the operation and maintenance are easy.

ending

The pump has excellent comprehensive performance, stability, durability, cleanliness and efficiency, and is a classic and reliable core component in high vacuum and ultra-high vacuum systems.

TURBOVAC 361涡轮分子泵    产品展示

产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218