ASYST UTV-F2500HA控制器

ASYST  UTV-F2500HA控制器   

1.产 品 资 料 介 绍：

1. 核心定位：隶属 MECS CS-7000 系列，是 UTV-2500H 系列的高性能升级款（HA 为高规格版），专用于晶圆搬运机械手的运动与逻辑控制。
2. 应用场景：适配半导体 8 寸 / 12 寸晶圆厂、FAB、面板产线，配套 ASYST 系列机械臂，完成真空 / 大气环境下的晶圆取放、传输、对准。
3. 控制性能：支持多轴伺服闭环控制，轨迹规划精度高，重复定位精度达 ±0.01mm，满足微米级洁净工况要求。
4. 运行速度：运动响应快，支持高速点对点传输，最大运行速度可达 1.5m/s，节拍效率优于同类控制器。
5. 系统架构：采用 DSP+FPGA 双处理器架构，运算能力强，实时性高，可处理复杂运动算法与 IO 逻辑。
6. 通讯接口：标配 DeviceNet、Ethernet、RS-232 通讯端口，支持与 PLC、传感器、上位机系统无缝组网。
7. IO 配置：集成 32 路数字输入、16 路数字输出，光电隔离设计，抗干扰强，适配各类工业传感器与执行器。
8. 编程功能：支持专用运动控制语言编程，内置晶圆传输标准宏程序，可快速实现轨迹编辑、故障诊断与参数调试。
9. 保护机制：具备过流、过载、超程、碰撞检测、紧急停止多重保护，保障设备与晶圆安全，降低生产故障。
10. 环境适配：工业级宽温工作（-10℃~50℃），符合 SEMI S2/S8 安全标准，适配 Class 10~1000 洁净室环境。
11. 硬件设计：模块化结构，紧凑型机箱（约 400×300×150mm），导轨安装，散热高效，适合机柜密集部署。
12. 兼容性：兼容 ASYST UTX/UTV 系列机械臂，支持 SMIF、FOUP、FOSB 等标准晶圆载体的对接控制。
13. 故障诊断：内置自诊断系统，实时监控运行状态，异常时输出报警代码，支持历史故障记录，便于快速维护。
14. 稳定性：无风扇散热设计，减少粉尘吸入，平均无故障时间（MTBF）长，满足 24 小时连续生产需求。
15. 软件支持：配套专用调试软件，支持参数监控、轨迹仿真、程序上传下载，降低现场调试难度。

ASYST  UTV-F2500HA控制器  产品英文

The ASYST UTV-F2500HA (CS-7100) is a high-precision semiconductor wafer transfer robot controller launched by the American company ASYST. It is designed specifically for cleanroom automation scenarios, ensuring the reliability and safety of wafer transfer in semiconductor processes through high-speed, stable, and precise motion control.

Core positioning: Belonging to the MECS CS-7000 series, it is a high-performance upgraded version of the UTV-2500H series (HA is a high specification version), specifically designed for motion and logic control of wafer handling manipulators.

Application scenarios: Suitable for semiconductor 8-inch/12 inch wafer fabs FAB、 Panel production line, equipped with ASYST series robotic arms, completes wafer picking, placing, transportation, and alignment in vacuum/atmospheric environments.

Control performance: Supports multi axis servo closed-loop control, with high trajectory planning accuracy and repeat positioning accuracy of ± 0.01mm, meeting the requirements of micron level clean working conditions.

Running speed: Fast motion response, supports high-speed point-to-point transmission, maximum running speed can reach 1.5m/s, and beat efficiency is better than similar controllers.

System architecture: Adopting a dual processor architecture of DSP and FPGA, it has strong computing power, high real-time performance, and can handle complex motion algorithms and IO logic.

Communication interface: standard DeviceNet, Ethernet, RS-232 communication ports, supporting seamless networking with PLC, sensors, and upper computer systems.

IO configuration: Integrated with 32 digital inputs and 16 digital outputs, with optoelectronic isolation design and strong anti-interference ability, suitable for various industrial sensors and actuators.

Programming function: Supports dedicated motion control language programming, built-in wafer transfer standard macro program, can quickly achieve trajectory editing, fault diagnosis, and parameter debugging.

Protection mechanism: Equipped with multiple protections such as overcurrent, overload, overtravel, collision detection, and emergency stop, ensuring equipment and wafer safety and reducing production failures.

Environmental adaptation: Industrial grade wide temperature operation (-10 ℃~50 ℃), compliant with SEMI S2/S8 safety standards, suitable for Class 10-1000 cleanroom environments.

Hardware design: Modular structure, compact chassis (approximately 400 × 300 × 150mm), rail mounted, efficient heat dissipation, suitable for dense deployment of cabinets.

Compatibility: Compatible with ASYST UTX/UTV series robotic arms, supporting docking control of standard wafer carriers such as SMIF, FOUP, FOSB, etc.

Fault diagnosis: Built in self diagnostic system, real-time monitoring of operating status, outputting alarm codes in case of abnormalities, supporting historical fault records for quick maintenance.

Stability: Fanless cooling design reduces dust inhalation, with a long mean time between failures (MTBF), meeting 24-hour continuous production needs.

Software support: Equipped with dedicated debugging software, supporting parameter monitoring, trajectory simulation, program upload and download, reducing the difficulty of on-site debugging.

ending

ASYST  UTV-F2500HA控制器    产品展示

产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218