1.产 品 资 料 介 绍:
AMAT 0190-B2950 is a DC control power supply specifically designed for semiconductor equipment, used for regulating the power supply of cavity electrostatic chucks.
1. Programmable adjustment of voltage and current, supporting constant voltage and current switching
2. Stable output voltage with small ripple, ensuring stable coating process
3. Can communicate with the host and remotely set various process parameters
4. Long term compensation design to reduce line voltage losses
5. Multiple protections for overvoltage, overcurrent, and overheating, automatic power-off in case of faults
6. Internally store multiple sets of process parameters and retain power-off data
7. Card insertion installation, convenient disassembly and replacement of cabinets
8. Air cooled heat dissipation, capable of continuous full load operation for a long time
9. Indicator lights display operation and fault status in different zones
10. Circuit board protective coating, corrosion-resistant and electromagnetic interference resistant
11. Reserve analog control interface with adjustable output for external signals
12. Original factory standard wiring, no need to change the wiring for connecting the cavity circuit
13. Built in watchdog, automatically reset in case of program abnormalities
14. Suitable for various process cavities such as coating and etching
15. Common replacement parts for equipment maintenance
AMAT 0190-B2950 is a key spare part for vacuum chamber electrical control system.

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218


