1.产 品 资 料 介 绍：
AMAT 0090-A7121 RF Controller (compatible with Endura/Ventura cavities)
Control the output power of RF power supply and collect real-time incident/reflected power
Automatic drive matching device tuning to reduce RF reflection loss
Bus docking device master control, remote issuance of process power parameters
Multiple protections against standing waves, overcurrent, and overheating, and abnormal cutoff of RF
Card insertion CPCI specification, in-situ plugging and replacement of cabinets
Multiple sets of process formulas are stored on the board, and power-off parameters are not lost
Equipped with a fault indicator light, quickly locate RF circuit faults
PCB triple protection coating, resistant to cavity RF interference and process corrosion
Analog interface, 0~10V external linkage power regulation
Hardware watchdog, automatic reset upon system crash to ensure the chamber does not shut down
Narrow amplitude regulated power supply, able to withstand voltage fluctuations in the computer room
Air cooled heat dissipation, continuous operation of 7 × 24-hour dust-free production line
Original factory standard wiring, no need to change wiring for direct installation
Used for PVD sputtering, dry etching plasma RF control
Common maintenance and replacement parts for AMAT coating machine
0090-A7121 is a core board for RF matching and power control.
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英文产品
Bently 350092通信网关模块
ABSOPULSS MOX12-P3509编码器模块
BENTLY 190065A-00-02-01-01-01检测模块
4.其他英文产品
Bently 3500/93 135785-02C System Monitor
DSPU131 Input/Output Module
3BSE000355R1 Unit Interface Board Module
| 36-0201 | 531X300CCHAXM3 | IMDSI14 |
| 345-L-P0-G0-H-E-M-N-N-SN-N-N | 531X300CCHAWM3 | IMCIS22 |
| 345-E-P5-G5-L-E-S-N-N-1E-D-H | 531X300CCHATM3 | IC3603A177AF6 |
| 345-E-P5-G5-H-E-S-N-N-SN-D-N | 531X300CCHASM3 | IC3603A177AF2 |
| 345-E-P5-G5-H-E-S-N-N-3E-D-N | 531X300CCHANM3 | IC3603A177AD2 |
| 345-E-P5-G5-H-E-S-N-N-1E-D-H | 531X300CCHAMM3 | IC3603A177AB2 |
| 345-E-P5-G5-H-E-M-N-N-3E-D-H | AMAT 0100-00409 | IC3603A143 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
