1.产 品 资 料 介 绍：
- 原厂 AMAT 0190-27355 型号，适配半导体主流制程设备。
- 采用闭循环 G-M 制冷，无需液氮，运行成本低。
- 二级冷头设计，低温可达 10K 以下，极限真空度高。
- 无油真空环境，避免油污污染，适配洁净工艺。
- 大抽速设计，对水汽、轻分子气体抽除效率高。
- 内置活性炭吸附层，有效捕获难冷凝气体。
- 全金属密封结构，抗泄漏，真空保持性好。
- 特种耐低温材质，长期低温工况不变形、不脆化。
- 集成防振结构，适配半导体设备振动环境。
- 支持快速再生，加热解析后可快速恢复抽气能力。
- 自带故障诊断，可监测冷头温度、真空度与运行状态。
- 标准接口设计，与 AMAT 设备主控系统无缝对接。
- 低功耗运行，能效比优于传统扩散泵。
- 符合半导体 SEMI 标准，原厂品质、兼容性强。
- 结构紧凑，安装维护便捷，适配洁净室布局。
AMAT 0190-27355低温泵 产品英文
The AMAT 0190-27355 cryogenic pump is a specialized refrigeration vacuum acquisition equipment for semiconductor high vacuum processes, suitable for harsh processes such as etching and deposition, with high cleanliness, high pumping speed, and strong stability. The following are its core characteristics.
Original AMAT 0190-27355 model, compatible with mainstream semiconductor process equipment.
Adopting closed-loop G-M refrigeration, no liquid nitrogen is required, and the operating cost is low.
Secondary cold head design, with a low temperature of up to 10K and high ultimate vacuum degree.
Oil free vacuum environment, avoiding oil pollution, suitable for clean processes.
High pumping speed design, with high efficiency in removing water vapor and light molecular gases.
Built in activated carbon adsorption layer effectively captures difficult to condense gases.
All metal sealed structure, leak resistant, and good vacuum retention.
Special low-temperature resistant material, which does not deform or become brittle under long-term low-temperature conditions.
Integrated anti vibration structure, adapted to the vibration environment of semiconductor equipment.
Supports rapid regeneration, and can quickly restore the pumping ability after heating and analysis.
Equipped with fault diagnosis, it can monitor the cold head temperature, vacuum degree, and operating status.
Standard interface design, seamlessly integrated with AMAT equipment control system.
Low power operation, with better energy efficiency than traditional diffusion pumps.
Compliant with semiconductor SEMI standards, with original factory quality and strong compatibility.
Compact structure, easy installation and maintenance, suitable for cleanroom layout.
In summary, the AMAT 0190-27355 cryogenic pump meets the core requirements of semiconductor ultra-high vacuum processes with high cleanliness, high pumping speed, high stability, and easy maintenance.
AMAT 0190-27355低温泵 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
