1.产 品 资 料 介 绍：
AMAT 0190-34645W 发电机
- 输出功率调控精度高，等离子状态稳定可控
- 低波纹射频输出，保障晶圆工艺均匀度
- 内置自动阻抗匹配，减少功率反射损耗
- 宽幅市电输入，电网波动不影响运行
- 搭载过流、过压、超温、驻波多重保护
- 一体化散热风道，长时间满载不易高温
- 金属屏蔽壳体，隔绝车间电磁干扰
- 实时功率监测，运行数据直观显示
- 标准机架插拔式，拆装替换维护便捷
- 适配 AMAT Centura、Endura 全系工艺设备
- 自带故障自检，故障代码快速定位问题
- 支持工业通讯，可对接产线中控系统
- 高低温耐受，密闭机柜长期连续工作
- 转换效率高，长期运行能耗更低
AMAT 0190-34645W发电机 产品英文
AMAT 0190-34645W Generator
Introduction: AMAT 0190-34645W is a semiconductor cavity specific RF plasma generator with stable power output, suitable for thin film and etching process machines. Its core features are as follows:
High precision output power regulation, stable and controllable plasma state
Low ripple RF output ensures wafer process uniformity
Built in automatic impedance matching to reduce power reflection loss
Wide range mains power input, grid fluctuations do not affect operation
Equipped with multiple protections including overcurrent, overvoltage, overtemperature, and standing wave
Integrated heat dissipation duct, not prone to high temperatures when fully loaded for a long time
Metal shielding shell, isolating electromagnetic interference in the workshop
Real time power monitoring, intuitive display of operating data
Standard rack plug-in, easy to disassemble, ｒｅｐｌａｃｅ and maintain
Compatible with the entire range of AMAT Centura and Endura process equipment
Built in fault self check, quick identification of fault codes to locate problems
Supports industrial communication and can be integrated with production line control systems
High and low temperature tolerance, long-term continuous operation of enclosed cabinets
High conversion efficiency and lower energy consumption for long-term operation
AMAT 0190-34645W发电机 产品展示
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| OCE940-001-01 | AMAT 0100-02734 | NKTU01-15 |
| OC950-604-01 | AMAT 0100-00455 | 57310001-KH DSBC173 ABB |
| OC950-603-01 | AMAT 0100-20068 | DSBB175 ABB |
| OC950-602-01 | AMAT 0100-09031 | NKST01-10 |
| OC950-601-01 | AMAT 0100-20032 | HESG447308R0001 70EA02A-ES |
| OC950-504-01 | AMAT 0100-00720 | HESG446457R0001 70ER01A |
| OC950-503-01 | AMAT 0100-90704 | NKTU01-10 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
