1.产 品 资 料 介 绍：
EDWARDS STP-H1303CV3 涡轮分子泵
- 大抽速设计，快速建立高真空环境
- 一体式转子叶片，压缩效率高
- 低震动运行，不影响精密制程
- 内置温控散热，长时间满载稳定
- 复合轴承结构，使用寿命更长
- 低粉尘产出，适配无尘车间
- 集成驱动电路，无需额外驱动器
- 标准通讯接口，可联动设备上位机
- 多重故障自检，异常代码直观易查
- 过载、超温自动停机保护泵体
- 紧凑型泵体，机柜安装节省空间
- 抗腐蚀内部材质，适配工艺废气
- 启停速度快，缩短待机准备时间
- 运行噪音低，改善车间工况
- 原厂标准化法兰，拆装替换便捷结尾：EDWARDS STP-H1303CV3 真空性能优异、运维简单，是半导体真空系统核心泵件。
EDWARDS STP-H1303CV3涡轮分子泵 产品英文
EDWARDS STP-H1303CV3 Turbomolecular Pump
Introduction: EDWARDS STP-H1303CV3 is a specialized turbo molecular pump for Edward Semiconductor, with stable pumping and suitable for vacuum wafer equipment.
High pumping speed design, quickly establishing a high vacuum environment
Integrated rotor blades with high compression efficiency
Low vibration operation, does not affect precision processes
Built in temperature control and heat dissipation, stable under full load for a long time
Composite bearing structure, longer service life
Low dust output, suitable for dust-free workshops
Integrated driver circuit, no need for additional drivers
Standard communication interface, capable of linking with the upper computer of the device
Multiple fault self check, intuitive and easy to check abnormal codes
Overload and overtemperature automatic shutdown protection pump body
Compact pump body, cabinet installation saves space
Corrosion resistant internal material, compatible with process exhaust gas
Fast start stop speed, reducing standby preparation time
Low operating noise, improving workshop conditions
Original factory standardized flange, easy disassembly and replacement
Conclusion: EDWARDS STP-H1303CV3 has excellent vacuum performance and simple operation and maintenance, making it the core pump component of semiconductor vacuum systems.
EDWARDS STP-H1303CV3涡轮分子泵 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
