1.产 品 资 料 介 绍：
AMAT 0190-B6280 闸阀
- 高真空密封结构，漏气率极低
- 耐腐蚀阀体材质，适配各类工艺气体
- 启闭动作平稳，无剧烈冲击震动
- 气动驱动设计，开关响应速度快
- 内置位置感应，实时反馈阀门状态
- 多重防尘密封，减少微粒污染晶圆
- 耐高温阀板，适配高温工艺腔体
- 标准法兰尺寸，直接替换同规格阀门
- 自带联锁信号，联动设备安全回路
- 低磨损密封件，延长整体使用寿命
- 紧凑型外形，设备内部安装省空间
- 简单模块化结构，拆装维护便捷
- 抗化学腐蚀，耐受刻蚀废气冲刷
- 双重安全限位，防止阀门过行程损坏
- 出厂真空检漏，出厂密封性统一稳定结尾：AMAT 0190-B6280 密封可靠、洁净度高，是半导体真空系统关键通断配件。
AMAT 0190-B6280闸阀 产品英文
AMAT 0190-B6280 Gate Valve
Introduction: AMAT 0190-B6280 is a semiconductor vacuum chamber specific gate valve with good sealing performance, suitable for wafer process vacuum pipelines.
High vacuum sealing structure with extremely low leakage rate
Corrosion resistant valve body material, suitable for various process gases
The opening and closing actions are smooth, without severe impact or vibration
Pneumatic drive design, fast switch response speed
Built in position sensing, real-time feedback of valve status
Multiple dust-proof seals to reduce particle contamination of wafers
High temperature resistant valve plate, suitable for high-temperature process chambers
Standard flange size, directly ｒｅｐｌａｃｅ valves of the same specification
Equipped with interlocking signals and linked equipment safety circuits
Low wear seals extend overall service life
Compact appearance, space saving installation inside the device
Simple modular structure, easy disassembly and maintenance
Resistant to chemical corrosion, resistant to etching exhaust gas erosion
Double safety limit to prevent valve damage due to overtravel
Factory vacuum leak detection, unified and stable factory sealing
Conclusion: AMAT 0190-B6280 has reliable sealing and high cleanliness, and is a key on/off component for semiconductor vacuum systems.
AMAT 0190-B6280闸阀 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
