1.产 品 资 料 介 绍:
ASYST 05050-014 预对准器
- CCD 光学检测,精准识别晶圆缺口与边缘位置
- 微米级定位精度,避免机械手取片磕碰晶圆
- 内置 LED 光源,支持设备自动校准光路
- 高速旋转定位,缩短晶圆上下料循环时长
- 全金属密封壳体,适配无尘洁净车间环境
- 低摩擦支撑台,减少晶圆表面划伤风险
- 集成信号反馈接口,实时上传对准状态
- 内置多重防碰检测,异常自动停机保护晶圆
- 紧凑型模块化结构,机台机柜拆装便捷
- 抗电磁干扰设计,适配刻蚀、镀膜周边设备
- 低噪音伺服旋转,长时间连续运行稳定
- 标准化通讯接口,直连 EFEM 整机控制系统
- 耐磨光学镜片,粉尘不易附着,维护周期长
- 24V 标准工业供电,整机功耗低发热小
- 兼容同系列 ASYST 晶圆搬运机械手系统结尾:ASYST 05050-014 定位精准、防护完善,是晶圆传输系统核心对位配件。
ASYST 05050-014预对准器 产品英文
ASYST 05050-014 Pre aligner
Introduction: ASYST 05050-014 is a specialized pre alignment unit for semiconductor wafer transfer equipment, used for wafer positioning correction.
CCD optical detection accurately identifies wafer notches and edge positions
Micron level positioning accuracy to avoid mechanical arm picking and bumping the wafer
Built in LED light source, supporting automatic calibration of light path for devices
High speed rotation positioning reduces the cycle time of wafer loading and unloading
All metal sealed shell, suitable for dust-free clean workshop environment
Low friction support platform reduces the risk of wafer surface scratches
Integrated signal feedback interface, real-time upload of alignment status
Built in multiple anti-collision detection, automatic shutdown protection for abnormal wafers
Compact modular structure, easy disassembly and assembly of machine cabinets
Anti electromagnetic interference design, suitable for etching and coating peripheral equipment
Low noise servo rotation, stable long-term continuous operation
Standardized communication interface, directly connected to EFEM whole machine control system
Wear resistant optical lenses, less prone to dust adhesion, long maintenance cycle
24V standard industrial power supply, low power consumption and low heat generation of the whole machine
Compatible with the same series of ASYST wafer handling robot systems
Conclusion: ASYST 05050-014 has precise positioning and complete protection, and is the core alignment component of wafer transfer systems.
ASYST 05050-014预对准器 产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218




