Adtec Plasma Tech AMVG-RCM1-SL远程控制单元
1.产 品 资 料 介 绍：
Adtec Plasma Tech AMVG-RCM1-SL 远程控制单元
- 适配 Adtec 全系 AMVG 系列射频发生器，匹配度高
- 远程调节功率、匹配、输出等核心工艺参数
- 实时采集电压电流信号，同步反馈设备运行状态
- 多重通讯隔离，隔绝射频腔体强电磁干扰
- 面板状态指示灯，直观查看运行、故障、告警信息
- 工业标准通讯接口，可对接整机上位控制系统
- 紧凑型模块化机身，机柜狭小位置方便安装
- 内置浪涌、过流保护，避免射频冲击损坏电路
- 宽范围直流供电，产线供电波动下稳定工作
- 按键 + 信号端子双控制方式，调试运维灵活
- 线路分区独立设计，控制回路互不产生干扰
- 金属屏蔽外壳，降低外界杂波对信号的影响
- 24 小时连续运行设计，适配半导体不间断产线
- 标准化接线端子，拆装更换无需改动线路
- 支持故障远程上传，便于快速排查射频异常结尾：Adtec Plasma Tech AMVG-RCM1-SL 调控稳定、抗干扰强，是等离子工艺射频设备配套核心远程备件。
Adtec Plasma Tech AMVG-RCM1-SL远程控制单元 产品英文
Adtec Plasma Tech AMVG-RCM1-SL Remote Control Unit
Introduction: Adtec Plasma Tech AMVG-RCM1-SL is a remote control unit for plasma RF power supply, which enables remote parameter control and status feedback of the machine.
Compatible with Adtec's entire AMVG series RF generators, with high compatibility
Remote adjustment of core process parameters such as power, matching, and output
Real time collection of voltage and current signals, synchronous feedback of equipment operating status
Multiple communication isolation, isolating strong electromagnetic interference from RF cavities
Panel status indicator light, visually viewing operation, fault, and alarm information
Industrial standard communication interface, capable of connecting to the upper control system of the entire machine
Compact modular body, easy to install in narrow cabinet positions
Built in surge and overcurrent protection to prevent circuit damage from RF impact
Wide range DC power supply, stable operation under power supply fluctuations on the production line
Dual control mode of button+signal terminal, flexible debugging and operation
Independent design of line partitioning, control circuits do not interfere with each other
Metal shielding shell reduces the impact of external noise on signals
24-hour continuous operation design, suitable for uninterrupted semiconductor production lines
Standardized wiring terminals, disassembly and replacement without changing the circuit
Support remote upload of faults for quick troubleshooting of RF anomalies
Conclusion: Adtec Plasma Tech AMVG-RCM1-SL has stable regulation and strong anti-interference, making it a core remote spare part for plasma process RF equipment.
Adtec Plasma Tech AMVG-RCM1-SL远程控制单元 产品展示
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| 6ES5998-0UF33 | 531X111PSHAPG1 | 820-30004-00 |
| 6ES5998-0SH21 | 193X804ADG02 | 710-655005-00 |
| 6ES5998-0MA34 | 531X113PSFASG1 | 710-659465-20 |
| 6ES5998-0KP21 | 531X111PSHACG1 | 281-242600-2 |
| 6ES5998-0DD51 | 531X111PSHASG3 | 710-658041-20 |
| 6ES5998-0CM01 | 531X111PSHASG2 | 720-24609-002 |
| 6ES5997-3UR11 | 531X100CCHARM1 | F31X170TBSAAG1 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
