1.产 品 资 料 介 绍：
SCHUMACHER VG600NI 蒸发器产品特点
- 温控区间 10-60℃，控温精度高，适配多数液态前驱体材料
- 一体化源杯腔体，密封性能强，杜绝微量介质泄漏污染腔体
- 内置高精度流量传感，实时监测汽化载气流量数值
- 搭载 LCD 数显操作面板，启停、参数设置直观便捷
- 多重安全防护，超温、低压、液位异常自动报警停机
- 耐腐蚀高纯金属腔体，适配各类腐蚀性电子化学品
- 均匀热传导结构，腔体全域温度无明显温差
- 支持标准工控通讯接口，可对接产线 PLC 集中管控
- 低脉动汽化输出，保障薄膜沉积厚度均匀一致
- 快拆式源杯组件，更换化学品、清洁维护省时省力
- 集成压力稳压模块，输出蒸气压长期保持稳定
- 低损耗保温层，减少热量散失，降低设备能耗
- 标准化机架尺寸，可直接装入半导体机台标准工位
- 防回流单向阀设计，避免工艺气体倒灌损坏内部元件
- 出厂完成密封性与汽化精度校准，上机即可投入使用SCHUMACHER VG600NI 蒸发器广泛用于镀膜、光刻配套气相供给，是半导体工艺稳定供气核心设备。
SCHUMACHER VG600NI蒸发器 产品英文
SCHUMACHER VG600NI evaporator product features
SCHUMACHER VG600NI is a semiconductor specific precision chemical evaporator, belonging to the VaporGuard series, suitable for thin film deposition processes, with stable and controllable vaporization output.
Temperature control range of 10-60 ℃, high temperature control accuracy, suitable for most liquid precursor materials
Integrated source cup chamber, strong sealing performance, prevents trace medium leakage and contamination of the chamber
Built in high-precision flow sensor, real-time monitoring of vaporization carrier gas flow value
Equipped with an LCD digital display operation panel, the start stop and parameter settings are intuitive and convenient
Multiple safety protections, automatic alarm and shutdown for over temperature, low pressure, and abnormal liquid level
Corrosion resistant high-purity metal chamber, suitable for various corrosive electronic chemicals
Uniform heat conduction structure, with no significant temperature difference across the entire cavity
Supports standard industrial control communication interface and can be integrated with production line PLC for centralized control
Low pulsation vaporization output ensures uniform and consistent film deposition thickness
Quick detachable source cup component, saving time and effort in replacing chemicals, cleaning and maintenance
Integrated pressure stabilization module, output vapor pressure remains stable for a long time
Low loss insulation layer, reducing heat loss and lowering equipment energy consumption
Standardized rack size, can be directly installed into semiconductor machine standard workstations
Anti reflux one-way valve design to prevent damage to internal components caused by process gas backflow
After completing the sealing and vaporization accuracy calibration at the factory, it can be put into use on the machine
The SCHUMACHER VG600NI evaporator is widely used for gas phase supply in coating and photolithography, and is a core equipment for stable gas supply in semiconductor processes.
SCHUMACHER VG600NI蒸发器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
