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DAIHEN 3Z39-000001-V1射频自动匹配器

发布时间：2026-06-24人气：

1.产品资料介绍：

DAIHEN 3Z39-000001-V1 适配半导体等离子设备，自动调节射频阻抗，功率传输稳定。

快速自动阻抗匹配，降低射频反射损耗
适配标准 13.56MHz 射频工作频率
大功率承载设计，适配刻蚀、镀膜工艺
内置实时功率检测，动态调整匹配参数
多重防护，超反射、过温自动停机保护
风冷散热结构，长时间满载不易过热
工业通讯接口，可对接机台 PLC 集中管控
高精度驱动调谐电容，匹配精度高
抗电磁干扰电路，车间复杂工况运行稳定
原厂标准机架尺寸，机柜拆装替换便捷
真空腔体适配设计，匹配输出连续平稳
断电保存匹配参数，重启无需重新调试
故障代码提示，快速排查匹配异常问题
纯铜射频回路，减少功率传输损耗
配套 DAIHEN 射频电源与 TEL 半导体设备DAIHEN 3Z39-000001-V1 射频自动匹配器是等离子工艺射频系统核心配件，保障等离子放电均匀稳定。

DAIHEN 3Z39-000001-V1 RF Automatic Matcher Product Features

DAIHEN 3Z39-000001-V1 is compatible with semiconductor plasma equipment, automatically adjusts RF impedance, and ensures stable power transmission.

Fast automatic impedance matching to reduce RF reflection loss

Adapt to standard 13.56MHz RF operating frequency

High power bearing design, compatible with etching and coating processes

Built in real-time power detection, dynamically adjusting matching parameters

Multiple protections, including super reflection and automatic shutdown protection against overheating

Air cooled cooling structure, not easily overheated when fully loaded for a long time

Industrial communication interface, capable of docking with machine PLC for centralized control

High precision drive tuning capacitor with high matching accuracy

Anti electromagnetic interference circuit, stable operation under complex working conditions in the workshop

Original factory standard rack size, easy disassembly and replacement of cabinets

Vacuum chamber adaptation design, matching continuous and stable output

Power off to save matching parameters, restart without the need for re debugging

Fault code prompt for quick troubleshooting of matching anomalies

Pure copper RF circuit reduces power transmission loss

Supporting DAIHEN RF power supply and TEL semiconductor equipment

DAIHEN 3Z39-000001-V1 RF automatic matching device is a core component of plasma process RF system, ensuring uniform and stable plasma discharge.

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