1.产 品 资 料 介 绍：
EDWARDS YT76-Z2-Z20 控制器单元产品特点
- 适配爱德华 SCU-1600 系列涡轮分子泵
- 闭环转速调控，真空压力维持平稳
- 宽幅通用电压，车间电压波动不宕机
- 内置多重保护，过温过流自动停机报警
- 实时采集泵体温度、转速运行数据
- 自带故障自检，故障代码快速定位问题
- RS485 通讯接口，对接机台 PLC 远程管控
- 断电保存运行参数，重启无需重新设置
- 低噪散热风道，长时间满载不易高温
- 抗电磁干扰电路，适配刻蚀镀膜洁净车间
- 模块化一体结构，机柜拆装替换简便
- 状态指示灯直观，转速异常一眼识别
- 兼容多款爱德华真空规，同步监测真空度
- 工业级元器件，连续量产使用寿命长
- 标准化接线端子，布线检修操作简单EDWARDS YT76-Z2-Z20 控制器单元是半导体真空系统核心控制配件，保障工艺腔体真空环境稳定。
EDWARDS YT76-Z2-Z20控制器单元 产品英文
EDWARDS YT76-Z2-Z20 Controller Unit Product Features
EDWARDS YT76-Z2-Z20 is a dedicated control unit for semiconductor molecular pumps, which controls the vacuum pump speed and chamber negative pressure, ensuring stable operation.
Compatible with Edward SCU-1600 series turbo molecular pump
Closed loop speed regulation, maintaining stable vacuum pressure
Wide range universal voltage, workshop voltage fluctuation without downtime
Built in multiple protections, automatic shutdown alarm for overheating and overcurrent
Real time collection of pump body temperature and speed operation data
Built in fault self check, quick identification of fault codes to locate problems
RS485 communication interface, connected to remote control of machine PLC
Power off to save operating parameters, restart without resetting
Low noise heat dissipation duct, not prone to high temperature when fully loaded for a long time
Anti electromagnetic interference circuit, suitable for etching and coating clean workshops
Modular integrated structure, easy disassembly and replacement of cabinets
The status indicator light is intuitive, and abnormal speed can be identified at a glance
Compatible with multiple Edward vacuum gauges, synchronously monitoring vacuum degree
Industrial grade components, continuous mass production with long service life
Standardized wiring terminals, easy wiring maintenance operation
The EDWARDS YT76-Z2-Z20 controller unit is the core control component of semiconductor vacuum systems, ensuring stable vacuum environment in the process chamber.
EDWARDS YT76-Z2-Z20控制器单元 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
