1.产 品 资 料 介 绍：
YASKAWA XU-ACP4860 晶圆预对准机产品特点
- 专为 300mm 标准晶圆设计，适配 AMAT 系列设备
- 伺服闭环控制，中心、缺口定位精度高
- 非接触式光学检测，避免划伤晶圆表面
- 高速扫描识别，缩短单片对准耗时
- 防静电整机结构，保护晶圆电路
- 洁净级不锈钢机身，适配无尘车间
- 内置真空吸附平台，固定晶圆不打滑
- 多重故障自检，识别晶圆偏移、吸附异常
- 搭载标准通讯接口，对接机台主控 PLC
- 小型紧凑机身，机台内部安装省空间
- 低震动运行，不干扰周边精密部件
- 多重安全防护，卡料自动停机报警
- 断电留存对准参数，重启无需重设
- 模块化组件，拆装维护简单快捷
- 原厂配套程序，上机即可量产使用YASKAWA XU-ACP4860 晶圆预对准机是刻蚀、薄膜设备晶圆传输定位核心配套单元。
YASKAWA XU-ACP4860晶圆预对准机 产品英文
YASKAWA XU-ACP4860 Wafer Pre Alignment Machine Product Features
YASKAWA XU-ACP4860 is compatible with 300mm wafers and is used for pre positioning the center of the semiconductor wafer and the notch on the semiconductor platform.
Specially designed for 300mm standard wafers, compatible with AMAT series equipment
Servo closed-loop control, high accuracy in center and gap positioning
Non contact optical inspection to avoid scratching the wafer surface
High speed scanning recognition reduces the time required for single-chip alignment
Anti static whole machine structure, protecting wafer circuits
Clean grade stainless steel body, suitable for dust-free workshops
Built in vacuum adsorption platform, fixing the wafer without slipping
Multiple fault self check, identifying wafer offset and abnormal adsorption
Equipped with standard communication interface, connected to the main control PLC of the machine
Small and compact body, space saving installation inside the machine
Low vibration operation, does not interfere with surrounding precision components
Multiple safety protections, automatic shutdown alarm for stuck materials
Power off to retain alignment parameters, restart without resetting
Modular components, easy and fast disassembly and maintenance
Original factory supporting program, ready for mass production on the machine
The YASKAWA XU-ACP4860 wafer pre alignment machine is a core supporting unit for etching and thin film equipment wafer transfer positioning.
YASKAWA XU-ACP4860晶圆预对准机 产品展示
视频展示
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| 6DD1610-0AK0 | CACR-IR050505FB | 8446-1019 |
| 6DD1610-0AH6 | 6SC9731-0AL2 | TRICONEX 3704E |
| 6DD1610-0AH5 | CACR-JU084AEA02 | 6DD2920-0AL0 |
| 6DD1610-0AH4 | CACR-JU22A3A | 6DD2920-0AH0 |
| 6DD1610-0AH3 | 6SC6901-2AA00-Z | 6DD2920-0AD0 |
| 6DD1610-0AH2 | CACR-SRCA15DZSY214, | 6DD2920-0AC0 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
