NIHON KOSHUHA AMC-T20-V-V射频控制器
1.产 品 资 料 介 绍：
NIHON KOSHUHA AMC-T20-V-V 射频控制器产品特点
- 适配 2.45GHz 射频频段，输出功率稳定可控
- 快速功率调节响应，等离子放电均匀
- 实时检测反射功率，抑制电弧干扰工艺
- 内置多重防护，过温、过反射自动停机
- 自带故障代码提示，检修排查效率高
- 标准工业通讯接口，可对接机台 PLC
- 断电保存工艺参数，重启无需重复设置
- 紧凑型模块化机身，机柜拆装替换简单
- 整机优化散热，长时间满载不易高温
- 抗电磁干扰线路，适配洁净车间复杂工况
- 高精度功率采样，输出波动幅度极小
- 标准 24V 工业供电，电压波动运行稳定
- 独立信号隔离回路，避免信号互相干扰
- 插拔式接线端子，布线维护操作简便
- 原厂匹配 TEL 系列半导体工艺设备NIHON KOSHUHA AMC-T20-V-V 射频控制器是射频电源配套核心控制部件，保障半导体等离子制程持续稳定。
NIHON KOSHUHA AMC-T20-V-V射频控制器 产品英文
NIHON KOSHUHA AMC-T20-V-V RF Controller Product Features
NIHON KOSHUHA AMC-T20-V-V is a dedicated RF control unit for semiconductor plasma equipment, which accurately controls RF output power and is compatible with etching and coating processes.
Suitable for 2.45GHz RF frequency band, stable and controllable output power
Fast power regulation response, uniform plasma discharge
Real time detection of reflected power and suppression of arc interference process
Built in multiple protections, automatic shutdown due to overheating and over reflection
Comes with fault code prompts, high efficiency in maintenance and troubleshooting
Standard industrial communication interface, compatible with machine PLC
Power off to save process parameters, restart without the need for repeated settings
Compact modular body, easy disassembly and replacement of cabinets
Optimized heat dissipation for the entire machine, making it less prone to high temperatures when fully loaded for extended periods of time
Anti electromagnetic interference circuit, suitable for complex working conditions in clean workshops
High precision power sampling with minimal output fluctuation amplitude
Standard 24V industrial power supply, stable operation due to voltage fluctuations
Independent signal isolation circuit to avoid signal interference with each other
Plug in terminal block, easy to maintain and operate wiring
Original factory matching TEL series semiconductor process equipment
The NIHON KOSHUHA AMC-T20-V-V RF controller is the core control component of the RF power supply, ensuring the continuous stability of the semiconductor plasma process.
NIHON KOSHUHA AMC-T20-V-V射频控制器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
